JPS5331975A - Full face exposure apparatus - Google Patents

Full face exposure apparatus

Info

Publication number
JPS5331975A
JPS5331975A JP10714176A JP10714176A JPS5331975A JP S5331975 A JPS5331975 A JP S5331975A JP 10714176 A JP10714176 A JP 10714176A JP 10714176 A JP10714176 A JP 10714176A JP S5331975 A JPS5331975 A JP S5331975A
Authority
JP
Japan
Prior art keywords
exposure apparatus
full face
face exposure
radiated
dividing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10714176A
Other languages
Japanese (ja)
Inventor
Ikuo Ito
Yoichi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP10714176A priority Critical patent/JPS5331975A/en
Publication of JPS5331975A publication Critical patent/JPS5331975A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To evenly radiate the surface being radiated of a fixed area by dividing a reflecting mirror used for a full face exposure apparatus to at least two or more parts and further bending the specified portions of the respective reflecting mirrors.
COPYRIGHT: (C)1978,JPO&Japio
JP10714176A 1976-09-06 1976-09-06 Full face exposure apparatus Pending JPS5331975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10714176A JPS5331975A (en) 1976-09-06 1976-09-06 Full face exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10714176A JPS5331975A (en) 1976-09-06 1976-09-06 Full face exposure apparatus

Publications (1)

Publication Number Publication Date
JPS5331975A true JPS5331975A (en) 1978-03-25

Family

ID=14451542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10714176A Pending JPS5331975A (en) 1976-09-06 1976-09-06 Full face exposure apparatus

Country Status (1)

Country Link
JP (1) JPS5331975A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6090339A (en) * 1984-07-04 1985-05-21 Hitachi Ltd Light irradiating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6090339A (en) * 1984-07-04 1985-05-21 Hitachi Ltd Light irradiating device

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