JPS5330278A - Porosity imparting treatment method - Google Patents

Porosity imparting treatment method

Info

Publication number
JPS5330278A
JPS5330278A JP10475776A JP10475776A JPS5330278A JP S5330278 A JPS5330278 A JP S5330278A JP 10475776 A JP10475776 A JP 10475776A JP 10475776 A JP10475776 A JP 10475776A JP S5330278 A JPS5330278 A JP S5330278A
Authority
JP
Japan
Prior art keywords
treatment method
imparting treatment
porosity imparting
porosity
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10475776A
Other languages
Japanese (ja)
Inventor
Takayuki Kadaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Gakki Co Ltd
Original Assignee
Nippon Gakki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Gakki Co Ltd filed Critical Nippon Gakki Co Ltd
Priority to JP10475776A priority Critical patent/JPS5330278A/en
Publication of JPS5330278A publication Critical patent/JPS5330278A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To make the object being treated porous by making structurally isometric parts beforehand or at the same instant of treatment in the intended regions of the object being treated and accelerating selective gas etching.
COPYRIGHT: (C)1978,JPO&Japio
JP10475776A 1976-09-01 1976-09-01 Porosity imparting treatment method Pending JPS5330278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10475776A JPS5330278A (en) 1976-09-01 1976-09-01 Porosity imparting treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10475776A JPS5330278A (en) 1976-09-01 1976-09-01 Porosity imparting treatment method

Publications (1)

Publication Number Publication Date
JPS5330278A true JPS5330278A (en) 1978-03-22

Family

ID=14389349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10475776A Pending JPS5330278A (en) 1976-09-01 1976-09-01 Porosity imparting treatment method

Country Status (1)

Country Link
JP (1) JPS5330278A (en)

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