JPS5329578B2 - - Google Patents
Info
- Publication number
- JPS5329578B2 JPS5329578B2 JP9914975A JP9914975A JPS5329578B2 JP S5329578 B2 JPS5329578 B2 JP S5329578B2 JP 9914975 A JP9914975 A JP 9914975A JP 9914975 A JP9914975 A JP 9914975A JP S5329578 B2 JPS5329578 B2 JP S5329578B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9914975A JPS5222883A (en) | 1975-08-14 | 1975-08-14 | Air cleaner unit for semiconductor unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9914975A JPS5222883A (en) | 1975-08-14 | 1975-08-14 | Air cleaner unit for semiconductor unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5222883A JPS5222883A (en) | 1977-02-21 |
| JPS5329578B2 true JPS5329578B2 (show.php) | 1978-08-22 |
Family
ID=14239623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9914975A Granted JPS5222883A (en) | 1975-08-14 | 1975-08-14 | Air cleaner unit for semiconductor unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5222883A (show.php) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2609030C3 (de) * | 1976-03-05 | 1984-05-24 | Fläkt AB, 13134 Nacka | Vorrichtung zum Führen von aus einer luftdurchlässigen perforierten Fläche austretenden Luftströmen |
| JPH067542B2 (ja) * | 1984-11-22 | 1994-01-26 | 株式会社日立製作所 | 製造装置 |
| JPS6261614A (ja) * | 1985-09-10 | 1987-03-18 | Aoki Kensetsu:Kk | 滅菌フイルタ− |
| US4987673A (en) * | 1987-06-18 | 1991-01-29 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for packaging semiconductor devices |
| EP0319145A3 (en) * | 1987-12-01 | 1991-05-29 | Varian Associates, Inc. | Horizontal laminar air flow work station |
| US4832717A (en) * | 1988-05-10 | 1989-05-23 | Nu Aire, Inc. | Clean air cabinet |
| US5665128A (en) * | 1995-12-05 | 1997-09-09 | Nuaire, Inc. | Clean air cabinet with valved exhaust |
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1975
- 1975-08-14 JP JP9914975A patent/JPS5222883A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5222883A (en) | 1977-02-21 |