JPS5222883A - Air cleaner unit for semiconductor unit - Google Patents

Air cleaner unit for semiconductor unit

Info

Publication number
JPS5222883A
JPS5222883A JP9914975A JP9914975A JPS5222883A JP S5222883 A JPS5222883 A JP S5222883A JP 9914975 A JP9914975 A JP 9914975A JP 9914975 A JP9914975 A JP 9914975A JP S5222883 A JPS5222883 A JP S5222883A
Authority
JP
Japan
Prior art keywords
unit
air cleaner
air
semiconductor
cleaner unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9914975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5329578B2 (show.php
Inventor
Kazumasa Ono
Hideichiro Onaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DAN SANGYO KK
NTT Inc
Original Assignee
DAN SANGYO KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DAN SANGYO KK, Nippon Telegraph and Telephone Corp filed Critical DAN SANGYO KK
Priority to JP9914975A priority Critical patent/JPS5222883A/ja
Publication of JPS5222883A publication Critical patent/JPS5222883A/ja
Publication of JPS5329578B2 publication Critical patent/JPS5329578B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP9914975A 1975-08-14 1975-08-14 Air cleaner unit for semiconductor unit Granted JPS5222883A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9914975A JPS5222883A (en) 1975-08-14 1975-08-14 Air cleaner unit for semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9914975A JPS5222883A (en) 1975-08-14 1975-08-14 Air cleaner unit for semiconductor unit

Publications (2)

Publication Number Publication Date
JPS5222883A true JPS5222883A (en) 1977-02-21
JPS5329578B2 JPS5329578B2 (show.php) 1978-08-22

Family

ID=14239623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9914975A Granted JPS5222883A (en) 1975-08-14 1975-08-14 Air cleaner unit for semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5222883A (show.php)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52108648A (en) * 1976-03-05 1977-09-12 Svenska Flaektfabriken Ab Exhausting system for cooking method of guiding air stream produced from airrpermeable surface* particularly perforated surface and apparatus for carrying out the same method
US4707167A (en) * 1985-09-10 1987-11-17 Aoki Corporation Air sterilization filter
US4832717A (en) * 1988-05-10 1989-05-23 Nu Aire, Inc. Clean air cabinet
JPH01170014A (ja) * 1987-12-01 1989-07-05 Varian Assoc Inc 水平層状空気流ワークステーション
US4987673A (en) * 1987-06-18 1991-01-29 Mitsubishi Denki Kabushiki Kaisha Apparatus for packaging semiconductor devices
US5015425A (en) * 1984-11-22 1991-05-14 Hitachi, Ltd. Manufacturing apparatus
US5665128A (en) * 1995-12-05 1997-09-09 Nuaire, Inc. Clean air cabinet with valved exhaust

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52108648A (en) * 1976-03-05 1977-09-12 Svenska Flaektfabriken Ab Exhausting system for cooking method of guiding air stream produced from airrpermeable surface* particularly perforated surface and apparatus for carrying out the same method
US5015425A (en) * 1984-11-22 1991-05-14 Hitachi, Ltd. Manufacturing apparatus
US4707167A (en) * 1985-09-10 1987-11-17 Aoki Corporation Air sterilization filter
US4987673A (en) * 1987-06-18 1991-01-29 Mitsubishi Denki Kabushiki Kaisha Apparatus for packaging semiconductor devices
JPH01170014A (ja) * 1987-12-01 1989-07-05 Varian Assoc Inc 水平層状空気流ワークステーション
US4832717A (en) * 1988-05-10 1989-05-23 Nu Aire, Inc. Clean air cabinet
US5665128A (en) * 1995-12-05 1997-09-09 Nuaire, Inc. Clean air cabinet with valved exhaust

Also Published As

Publication number Publication date
JPS5329578B2 (show.php) 1978-08-22

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