JPS5328741B2 - - Google Patents

Info

Publication number
JPS5328741B2
JPS5328741B2 JP2613076A JP2613076A JPS5328741B2 JP S5328741 B2 JPS5328741 B2 JP S5328741B2 JP 2613076 A JP2613076 A JP 2613076A JP 2613076 A JP2613076 A JP 2613076A JP S5328741 B2 JPS5328741 B2 JP S5328741B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2613076A
Other languages
Japanese (ja)
Other versions
JPS52109865A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2613076A priority Critical patent/JPS52109865A/ja
Publication of JPS52109865A publication Critical patent/JPS52109865A/ja
Publication of JPS5328741B2 publication Critical patent/JPS5328741B2/ja
Granted legal-status Critical Current

Links

JP2613076A 1976-03-12 1976-03-12 Inpurity adding method to silicon Granted JPS52109865A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2613076A JPS52109865A (en) 1976-03-12 1976-03-12 Inpurity adding method to silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2613076A JPS52109865A (en) 1976-03-12 1976-03-12 Inpurity adding method to silicon

Publications (2)

Publication Number Publication Date
JPS52109865A JPS52109865A (en) 1977-09-14
JPS5328741B2 true JPS5328741B2 (enExample) 1978-08-16

Family

ID=12184970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2613076A Granted JPS52109865A (en) 1976-03-12 1976-03-12 Inpurity adding method to silicon

Country Status (1)

Country Link
JP (1) JPS52109865A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2362320A1 (de) * 1973-12-14 1975-06-19 Siemens Ag Verfahren zum herstellen von homogendotierten siliciumeinkristallen durch neutronenbestrahlung
DE2356376A1 (de) * 1973-11-12 1975-05-15 Siemens Ag Verfahren zum herstellen von homogen dotierten siliciumeinkristallen mit n-leitfaehigkeit durch neutronenbestrahlung

Also Published As

Publication number Publication date
JPS52109865A (en) 1977-09-14

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