JPS5328380A - Function inspecting method of semiconductor elements - Google Patents
Function inspecting method of semiconductor elementsInfo
- Publication number
- JPS5328380A JPS5328380A JP9635276A JP9635276A JPS5328380A JP S5328380 A JPS5328380 A JP S5328380A JP 9635276 A JP9635276 A JP 9635276A JP 9635276 A JP9635276 A JP 9635276A JP S5328380 A JPS5328380 A JP S5328380A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor elements
- inspecting method
- function inspecting
- function
- signals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To perform accurate voltage measurement by passing two-dimensional electron detecting signals through a specified filter and measuring said signals.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9635276A JPS5328380A (en) | 1976-08-11 | 1976-08-11 | Function inspecting method of semiconductor elements |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9635276A JPS5328380A (en) | 1976-08-11 | 1976-08-11 | Function inspecting method of semiconductor elements |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5328380A true JPS5328380A (en) | 1978-03-16 |
JPS543347B2 JPS543347B2 (en) | 1979-02-21 |
Family
ID=14162594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9635276A Granted JPS5328380A (en) | 1976-08-11 | 1976-08-11 | Function inspecting method of semiconductor elements |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5328380A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5120255A (en) * | 1974-08-13 | 1976-02-18 | Nippon Zeon Co | Kakyokanona epiharohidorinjugotaisoseibutsu |
-
1976
- 1976-08-11 JP JP9635276A patent/JPS5328380A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5120255A (en) * | 1974-08-13 | 1976-02-18 | Nippon Zeon Co | Kakyokanona epiharohidorinjugotaisoseibutsu |
Also Published As
Publication number | Publication date |
---|---|
JPS543347B2 (en) | 1979-02-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS54935A (en) | Pattern detector | |
JPS5296047A (en) | Original point detector | |
JPS5328380A (en) | Function inspecting method of semiconductor elements | |
JPS52121355A (en) | Length measuring method and length measuring device for long-length ma terials having magnetic properties | |
JPS53128238A (en) | Velocity test system | |
JPS5312218A (en) | Automatic detection range setting circuit | |
JPS5355057A (en) | Measuring apparatus of multipoint temperature | |
JPS51135474A (en) | To analyze a semiconductor device | |
JPS53108488A (en) | Flaw detector for tubes | |
JPS5370473A (en) | Partial discharge measuring apparatus | |
JPS52155065A (en) | Wafer insepaction method | |
JPS5441783A (en) | Method and apparatus for detection of ultrasonic wave receiving signals | |
JPS53117482A (en) | Testing method of sensitivity of vibrometer sensor | |
JPS5363083A (en) | Detecting circuit for minute changing quantity | |
JPS5333193A (en) | Measuring apparatus of transformed quantity at diffusion welding | |
JPS5374452A (en) | Abnormality detector | |
JPS52105884A (en) | Tester using eddy current | |
JPS5329184A (en) | Eddy current flaw detector | |
JPS5224079A (en) | Measurement method of semiconductor apparatus | |
JPS52104865A (en) | X-ray analysis apparatus in electronic microscope or like | |
JPS53109691A (en) | Flow cell type analysis method and apparatus liquid for specimen | |
JPS5360535A (en) | Detection of magnetic material by magnetic modulator of even higher harmonictype | |
JPS5414280A (en) | Deviation value detecting circuit | |
JPS51124982A (en) | A low background radiation detector | |
JPS5322376A (en) | Inspecting method of semiconductor device |