JPS5328380A - Function inspecting method of semiconductor elements - Google Patents

Function inspecting method of semiconductor elements

Info

Publication number
JPS5328380A
JPS5328380A JP9635276A JP9635276A JPS5328380A JP S5328380 A JPS5328380 A JP S5328380A JP 9635276 A JP9635276 A JP 9635276A JP 9635276 A JP9635276 A JP 9635276A JP S5328380 A JPS5328380 A JP S5328380A
Authority
JP
Japan
Prior art keywords
semiconductor elements
inspecting method
function inspecting
function
signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9635276A
Other languages
Japanese (ja)
Other versions
JPS543347B2 (en
Inventor
Yasuo Furukawa
Yushi Inagaki
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9635276A priority Critical patent/JPS5328380A/en
Publication of JPS5328380A publication Critical patent/JPS5328380A/en
Publication of JPS543347B2 publication Critical patent/JPS543347B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To perform accurate voltage measurement by passing two-dimensional electron detecting signals through a specified filter and measuring said signals.
COPYRIGHT: (C)1978,JPO&Japio
JP9635276A 1976-08-11 1976-08-11 Function inspecting method of semiconductor elements Granted JPS5328380A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9635276A JPS5328380A (en) 1976-08-11 1976-08-11 Function inspecting method of semiconductor elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9635276A JPS5328380A (en) 1976-08-11 1976-08-11 Function inspecting method of semiconductor elements

Publications (2)

Publication Number Publication Date
JPS5328380A true JPS5328380A (en) 1978-03-16
JPS543347B2 JPS543347B2 (en) 1979-02-21

Family

ID=14162594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9635276A Granted JPS5328380A (en) 1976-08-11 1976-08-11 Function inspecting method of semiconductor elements

Country Status (1)

Country Link
JP (1) JPS5328380A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120255A (en) * 1974-08-13 1976-02-18 Nippon Zeon Co Kakyokanona epiharohidorinjugotaisoseibutsu

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120255A (en) * 1974-08-13 1976-02-18 Nippon Zeon Co Kakyokanona epiharohidorinjugotaisoseibutsu

Also Published As

Publication number Publication date
JPS543347B2 (en) 1979-02-21

Similar Documents

Publication Publication Date Title
JPS54935A (en) Pattern detector
JPS5296047A (en) Original point detector
JPS5328380A (en) Function inspecting method of semiconductor elements
JPS52121355A (en) Length measuring method and length measuring device for long-length ma terials having magnetic properties
JPS53128238A (en) Velocity test system
JPS5312218A (en) Automatic detection range setting circuit
JPS5355057A (en) Measuring apparatus of multipoint temperature
JPS51135474A (en) To analyze a semiconductor device
JPS53108488A (en) Flaw detector for tubes
JPS5370473A (en) Partial discharge measuring apparatus
JPS52155065A (en) Wafer insepaction method
JPS5441783A (en) Method and apparatus for detection of ultrasonic wave receiving signals
JPS53117482A (en) Testing method of sensitivity of vibrometer sensor
JPS5363083A (en) Detecting circuit for minute changing quantity
JPS5333193A (en) Measuring apparatus of transformed quantity at diffusion welding
JPS5374452A (en) Abnormality detector
JPS52105884A (en) Tester using eddy current
JPS5329184A (en) Eddy current flaw detector
JPS5224079A (en) Measurement method of semiconductor apparatus
JPS52104865A (en) X-ray analysis apparatus in electronic microscope or like
JPS53109691A (en) Flow cell type analysis method and apparatus liquid for specimen
JPS5360535A (en) Detection of magnetic material by magnetic modulator of even higher harmonictype
JPS5414280A (en) Deviation value detecting circuit
JPS51124982A (en) A low background radiation detector
JPS5322376A (en) Inspecting method of semiconductor device