JPS532755B2 - - Google Patents
Info
- Publication number
- JPS532755B2 JPS532755B2 JP9417073A JP9417073A JPS532755B2 JP S532755 B2 JPS532755 B2 JP S532755B2 JP 9417073 A JP9417073 A JP 9417073A JP 9417073 A JP9417073 A JP 9417073A JP S532755 B2 JPS532755 B2 JP S532755B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9417073A JPS532755B2 (es) | 1973-08-22 | 1973-08-22 | |
| GB2323574*[A GB1442507A (en) | 1973-08-22 | 1974-07-26 | Apparatus for displaying the energy distribution of a charged particle beam |
| NLAANVRAGE7410276,A NL180155C (nl) | 1973-08-22 | 1974-07-31 | Inrichting voor het weergeven van de energieverdeling van geladen deeltjes. |
| US495665A US3909610A (en) | 1973-08-22 | 1974-08-08 | Apparatus for displaying the energy distribution of a charged particle beam |
| DE2440120A DE2440120A1 (de) | 1973-08-22 | 1974-08-21 | Vorrichtung zur wiedergabe der energieverteilung eines aus geladenen teilchen bestehenden strahles |
| FR7428731A FR2241785B1 (es) | 1973-08-22 | 1974-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9417073A JPS532755B2 (es) | 1973-08-22 | 1973-08-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5044889A JPS5044889A (es) | 1975-04-22 |
| JPS532755B2 true JPS532755B2 (es) | 1978-01-31 |
Family
ID=14102864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9417073A Expired JPS532755B2 (es) | 1973-08-22 | 1973-08-22 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3909610A (es) |
| JP (1) | JPS532755B2 (es) |
| DE (1) | DE2440120A1 (es) |
| FR (1) | FR2241785B1 (es) |
| GB (1) | GB1442507A (es) |
| NL (1) | NL180155C (es) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3965351A (en) * | 1974-10-30 | 1976-06-22 | The United States Of America As Represented By The United States Energy Research And Development Administration | Differential auger spectrometry |
| JPS5780649A (en) * | 1980-11-10 | 1982-05-20 | Hitachi Ltd | Electron ray energy analyzer |
| NL8600685A (nl) * | 1986-03-18 | 1987-10-16 | Philips Nv | Apparaat voor energie selectieve afbeelding. |
| DE3820549A1 (de) * | 1988-06-16 | 1989-12-21 | Fraunhofer Ges Forschung | Verfahren und vorrichtung zur untersuchung von membranoberflaechen |
| JPH04264243A (ja) * | 1991-02-20 | 1992-09-21 | Jeol Ltd | オージェ像計測におけるピークエネルギーシフト補正法 |
| JPH1097836A (ja) * | 1996-09-24 | 1998-04-14 | Hitachi Keisokki Service Kk | 走査形電子顕微鏡 |
| JP2002508065A (ja) * | 1997-07-04 | 2002-03-12 | ドイチェス・クレプスフォルシュングスツェントルム・スチフトゥング・デス・エッフェントリヒェン・レヒツ | 試料中の元素を検出する方法 |
| SE2050142A1 (en) * | 2012-03-06 | 2020-02-10 | Scienta Omicron Ab | Analyser arrangement for particle spectrometer |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3191028A (en) * | 1963-04-22 | 1965-06-22 | Albert V Crewe | Scanning electron microscope |
| US3626184A (en) * | 1970-03-05 | 1971-12-07 | Atomic Energy Commission | Detector system for a scanning electron microscope |
| US3812288A (en) * | 1972-11-21 | 1974-05-21 | Edax Int Inc | Television display system |
-
1973
- 1973-08-22 JP JP9417073A patent/JPS532755B2/ja not_active Expired
-
1974
- 1974-07-26 GB GB2323574*[A patent/GB1442507A/en not_active Expired
- 1974-07-31 NL NLAANVRAGE7410276,A patent/NL180155C/xx not_active IP Right Cessation
- 1974-08-08 US US495665A patent/US3909610A/en not_active Expired - Lifetime
- 1974-08-21 FR FR7428731A patent/FR2241785B1/fr not_active Expired
- 1974-08-21 DE DE2440120A patent/DE2440120A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2241785A1 (es) | 1975-03-21 |
| NL180155B (nl) | 1986-08-01 |
| US3909610A (en) | 1975-09-30 |
| NL180155C (nl) | 1987-01-02 |
| JPS5044889A (es) | 1975-04-22 |
| DE2440120A1 (de) | 1975-03-27 |
| NL7410276A (nl) | 1975-02-25 |
| FR2241785B1 (es) | 1977-03-25 |
| GB1442507A (en) | 1976-07-14 |