JPS5325992U - - Google Patents
Info
- Publication number
- JPS5325992U JPS5325992U JP1976107034U JP10703476U JPS5325992U JP S5325992 U JPS5325992 U JP S5325992U JP 1976107034 U JP1976107034 U JP 1976107034U JP 10703476 U JP10703476 U JP 10703476U JP S5325992 U JPS5325992 U JP S5325992U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976107034U JPS5613112Y2 (en:Method) | 1976-08-12 | 1976-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976107034U JPS5613112Y2 (en:Method) | 1976-08-12 | 1976-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5325992U true JPS5325992U (en:Method) | 1978-03-04 |
| JPS5613112Y2 JPS5613112Y2 (en:Method) | 1981-03-26 |
Family
ID=28717093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976107034U Expired JPS5613112Y2 (en:Method) | 1976-08-12 | 1976-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5613112Y2 (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007129225A (ja) * | 2005-10-31 | 2007-05-24 | Advanced Laser Separation Internatl Bv | 基板の表面内に一つもしくはそれ以上の離間した切断溝を形成するための装置および方法 |
| JP2010534140A (ja) * | 2007-07-24 | 2010-11-04 | イーオー テクニクス カンパニー リミテッド | レーザビーム分割を利用したレーザ加工装置及び方法 |
-
1976
- 1976-08-12 JP JP1976107034U patent/JPS5613112Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007129225A (ja) * | 2005-10-31 | 2007-05-24 | Advanced Laser Separation Internatl Bv | 基板の表面内に一つもしくはそれ以上の離間した切断溝を形成するための装置および方法 |
| JP2010534140A (ja) * | 2007-07-24 | 2010-11-04 | イーオー テクニクス カンパニー リミテッド | レーザビーム分割を利用したレーザ加工装置及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5613112Y2 (en:Method) | 1981-03-26 |