JPS5324303B2 - - Google Patents

Info

Publication number
JPS5324303B2
JPS5324303B2 JP1323375A JP1323375A JPS5324303B2 JP S5324303 B2 JPS5324303 B2 JP S5324303B2 JP 1323375 A JP1323375 A JP 1323375A JP 1323375 A JP1323375 A JP 1323375A JP S5324303 B2 JPS5324303 B2 JP S5324303B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1323375A
Other languages
Japanese (ja)
Other versions
JPS5188182A (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1323375A priority Critical patent/JPS5324303B2/ja
Publication of JPS5188182A publication Critical patent/JPS5188182A/ja
Publication of JPS5324303B2 publication Critical patent/JPS5324303B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP1323375A 1975-01-31 1975-01-31 Expired JPS5324303B2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1323375A JPS5324303B2 (ko) 1975-01-31 1975-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1323375A JPS5324303B2 (ko) 1975-01-31 1975-01-31

Publications (2)

Publication Number Publication Date
JPS5188182A JPS5188182A (ko) 1976-08-02
JPS5324303B2 true JPS5324303B2 (ko) 1978-07-20

Family

ID=11827457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1323375A Expired JPS5324303B2 (ko) 1975-01-31 1975-01-31

Country Status (1)

Country Link
JP (1) JPS5324303B2 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175832A (ja) * 1983-03-07 1983-10-15 Hitachi Ltd プラズマ処理装置
US4554047A (en) * 1984-10-12 1985-11-19 At&T Bell Laboratories Downstream apparatus and technique
JPH08288096A (ja) * 1995-02-13 1996-11-01 Mitsubishi Electric Corp プラズマ処理装置
JP2920874B2 (ja) * 1995-07-25 1999-07-19 東京応化工業株式会社 プラズマ反応処理装置
JPH10270428A (ja) * 1997-03-27 1998-10-09 Mitsubishi Electric Corp プラズマ処理装置
JPH10270430A (ja) 1997-03-27 1998-10-09 Mitsubishi Electric Corp プラズマ処理装置
JP2005149956A (ja) * 2003-11-17 2005-06-09 Ulvac Japan Ltd 大面積高均一プラズマ処理方法及び装置

Also Published As

Publication number Publication date
JPS5188182A (ko) 1976-08-02

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