JPS5324303B2 - - Google Patents
Info
- Publication number
- JPS5324303B2 JPS5324303B2 JP1323375A JP1323375A JPS5324303B2 JP S5324303 B2 JPS5324303 B2 JP S5324303B2 JP 1323375 A JP1323375 A JP 1323375A JP 1323375 A JP1323375 A JP 1323375A JP S5324303 B2 JPS5324303 B2 JP S5324303B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1323375A JPS5324303B2 (https=) | 1975-01-31 | 1975-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1323375A JPS5324303B2 (https=) | 1975-01-31 | 1975-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5188182A JPS5188182A (https=) | 1976-08-02 |
| JPS5324303B2 true JPS5324303B2 (https=) | 1978-07-20 |
Family
ID=11827457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1323375A Expired JPS5324303B2 (https=) | 1975-01-31 | 1975-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5324303B2 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58175832A (ja) * | 1983-03-07 | 1983-10-15 | Hitachi Ltd | プラズマ処理装置 |
| US4554047A (en) * | 1984-10-12 | 1985-11-19 | At&T Bell Laboratories | Downstream apparatus and technique |
| JPH08288096A (ja) * | 1995-02-13 | 1996-11-01 | Mitsubishi Electric Corp | プラズマ処理装置 |
| JP2920874B2 (ja) * | 1995-07-25 | 1999-07-19 | 東京応化工業株式会社 | プラズマ反応処理装置 |
| JPH10270430A (ja) | 1997-03-27 | 1998-10-09 | Mitsubishi Electric Corp | プラズマ処理装置 |
| JPH10270428A (ja) * | 1997-03-27 | 1998-10-09 | Mitsubishi Electric Corp | プラズマ処理装置 |
| JP2005149956A (ja) * | 2003-11-17 | 2005-06-09 | Ulvac Japan Ltd | 大面積高均一プラズマ処理方法及び装置 |
-
1975
- 1975-01-31 JP JP1323375A patent/JPS5324303B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5188182A (https=) | 1976-08-02 |