JPS5320377B2 - - Google Patents
Info
- Publication number
- JPS5320377B2 JPS5320377B2 JP14072575A JP14072575A JPS5320377B2 JP S5320377 B2 JPS5320377 B2 JP S5320377B2 JP 14072575 A JP14072575 A JP 14072575A JP 14072575 A JP14072575 A JP 14072575A JP S5320377 B2 JPS5320377 B2 JP S5320377B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14072575A JPS5264871A (en) | 1975-11-26 | 1975-11-26 | Semiconductor surface treating agent |
| GB190479A GB1573208A (en) | 1975-11-26 | 1976-08-24 | Surface treating agent adapted for intermediate products of a semiconductor device |
| GB35164/76A GB1573206A (en) | 1975-11-26 | 1976-08-24 | Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices |
| GB190379A GB1573207A (en) | 1975-11-26 | 1976-08-24 | Surface treating agent adapted of intermediate products ofa semiconductor device |
| NLAANVRAGE7609602,A NL185116C (nl) | 1975-11-26 | 1976-08-30 | Werkwijze voor het behandelen van oppervlakken van tussenprodukten bij het vervaardigen van halfgeleiders. |
| DE2639004A DE2639004C2 (de) | 1975-11-26 | 1976-08-30 | Wäßrige Lösung zur Oberflächenbehandlung von Zwischenprodukten bei der Herstellung von Halbleiterbauelementen |
| US05/927,139 US4239661A (en) | 1975-11-26 | 1978-07-21 | Surface-treating agent adapted for intermediate products of a semiconductor device |
| US06/213,317 US4339340A (en) | 1975-11-26 | 1980-12-05 | Surface-treating agent adapted for intermediate products of a semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14072575A JPS5264871A (en) | 1975-11-26 | 1975-11-26 | Semiconductor surface treating agent |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5264871A JPS5264871A (en) | 1977-05-28 |
| JPS5320377B2 true JPS5320377B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-06-26 |
Family
ID=15275245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14072575A Granted JPS5264871A (en) | 1975-11-26 | 1975-11-26 | Semiconductor surface treating agent |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5264871A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57125886U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1981-01-30 | 1982-08-05 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0638160B2 (ja) * | 1986-02-24 | 1994-05-18 | 東京応化工業株式会社 | ポジ型ホトレジストのスカム除去剤 |
-
1975
- 1975-11-26 JP JP14072575A patent/JPS5264871A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57125886U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1981-01-30 | 1982-08-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5264871A (en) | 1977-05-28 |