JPS5318315B2 - - Google Patents
Info
- Publication number
- JPS5318315B2 JPS5318315B2 JP12951572A JP12951572A JPS5318315B2 JP S5318315 B2 JPS5318315 B2 JP S5318315B2 JP 12951572 A JP12951572 A JP 12951572A JP 12951572 A JP12951572 A JP 12951572A JP S5318315 B2 JPS5318315 B2 JP S5318315B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Weting (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12951572A JPS5318315B2 (https=) | 1972-12-26 | 1972-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12951572A JPS5318315B2 (https=) | 1972-12-26 | 1972-12-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4989479A JPS4989479A (https=) | 1974-08-27 |
| JPS5318315B2 true JPS5318315B2 (https=) | 1978-06-14 |
Family
ID=15011389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12951572A Expired JPS5318315B2 (https=) | 1972-12-26 | 1972-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5318315B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS551172A (en) * | 1979-03-19 | 1980-01-07 | Semiconductor Res Found | Chemical semiconductor apparatus |
| JPS5643723A (en) * | 1979-09-18 | 1981-04-22 | Nec Corp | Manufacture of semiconductor element |
| JPS6074538A (ja) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | 半導体素子の製造方法 |
-
1972
- 1972-12-26 JP JP12951572A patent/JPS5318315B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4989479A (https=) | 1974-08-27 |