JPS5315246Y2 - - Google Patents

Info

Publication number
JPS5315246Y2
JPS5315246Y2 JP5392472U JP5392472U JPS5315246Y2 JP S5315246 Y2 JPS5315246 Y2 JP S5315246Y2 JP 5392472 U JP5392472 U JP 5392472U JP 5392472 U JP5392472 U JP 5392472U JP S5315246 Y2 JPS5315246 Y2 JP S5315246Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5392472U
Other languages
Japanese (ja)
Other versions
JPS4911658U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5392472U priority Critical patent/JPS5315246Y2/ja
Publication of JPS4911658U publication Critical patent/JPS4911658U/ja
Application granted granted Critical
Publication of JPS5315246Y2 publication Critical patent/JPS5315246Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Connecting Device With Holders (AREA)
JP5392472U 1972-05-08 1972-05-08 Expired JPS5315246Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5392472U JPS5315246Y2 (cg-RX-API-DMAC7.html) 1972-05-08 1972-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5392472U JPS5315246Y2 (cg-RX-API-DMAC7.html) 1972-05-08 1972-05-08

Publications (2)

Publication Number Publication Date
JPS4911658U JPS4911658U (cg-RX-API-DMAC7.html) 1974-01-31
JPS5315246Y2 true JPS5315246Y2 (cg-RX-API-DMAC7.html) 1978-04-21

Family

ID=27936811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5392472U Expired JPS5315246Y2 (cg-RX-API-DMAC7.html) 1972-05-08 1972-05-08

Country Status (1)

Country Link
JP (1) JPS5315246Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5729308Y2 (cg-RX-API-DMAC7.html) * 1976-05-06 1982-06-26
JPS5527240Y2 (cg-RX-API-DMAC7.html) * 1977-10-03 1980-06-30
JP2806431B2 (ja) * 1989-04-28 1998-09-30 株式会社ニデック ウェーハ搬送装置
JPH04103652U (ja) * 1991-02-18 1992-09-07 株式会社富士通宮城エレクトロニクス バキユームピンセツト
JP2806671B2 (ja) * 1992-01-28 1998-09-30 九州日本電気株式会社 ウェーハ保持具

Also Published As

Publication number Publication date
JPS4911658U (cg-RX-API-DMAC7.html) 1974-01-31

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