JPS5314574A - Clean bench - Google Patents
Clean benchInfo
- Publication number
- JPS5314574A JPS5314574A JP8815776A JP8815776A JPS5314574A JP S5314574 A JPS5314574 A JP S5314574A JP 8815776 A JP8815776 A JP 8815776A JP 8815776 A JP8815776 A JP 8815776A JP S5314574 A JPS5314574 A JP S5314574A
- Authority
- JP
- Japan
- Prior art keywords
- clean
- clean bench
- air
- chamber
- velocity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To facilitate putting the hand into and out from a clean chamber and hold high cleanliness by providing a clean air nozzle part in the upper part of the opening of the clean chamber and flowing the clean air of the velocity higher than the velocity of the clean air to be flown in the clean chamber thereby forming an air curtain layer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8815776A JPS5314574A (en) | 1976-07-26 | 1976-07-26 | Clean bench |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8815776A JPS5314574A (en) | 1976-07-26 | 1976-07-26 | Clean bench |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5314574A true JPS5314574A (en) | 1978-02-09 |
Family
ID=13935077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8815776A Pending JPS5314574A (en) | 1976-07-26 | 1976-07-26 | Clean bench |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5314574A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57166339U (en) * | 1981-04-13 | 1982-10-20 | ||
JPS59154015A (en) * | 1983-02-23 | 1984-09-03 | Hitachi Ltd | Clean tunnel |
-
1976
- 1976-07-26 JP JP8815776A patent/JPS5314574A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57166339U (en) * | 1981-04-13 | 1982-10-20 | ||
JPS6214684Y2 (en) * | 1981-04-13 | 1987-04-15 | ||
JPS59154015A (en) * | 1983-02-23 | 1984-09-03 | Hitachi Ltd | Clean tunnel |
JPH0454962B2 (en) * | 1983-02-23 | 1992-09-01 | Hitachi Ltd |
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