JPS53144544U - - Google Patents
Info
- Publication number
- JPS53144544U JPS53144544U JP4951577U JP4951577U JPS53144544U JP S53144544 U JPS53144544 U JP S53144544U JP 4951577 U JP4951577 U JP 4951577U JP 4951577 U JP4951577 U JP 4951577U JP S53144544 U JPS53144544 U JP S53144544U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
- Fixing For Electrophotography (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977049515U JPS5833665Y2 (en) | 1977-04-21 | 1977-04-21 | surface heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977049515U JPS5833665Y2 (en) | 1977-04-21 | 1977-04-21 | surface heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53144544U true JPS53144544U (en) | 1978-11-14 |
| JPS5833665Y2 JPS5833665Y2 (en) | 1983-07-27 |
Family
ID=28935248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977049515U Expired JPS5833665Y2 (en) | 1977-04-21 | 1977-04-21 | surface heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5833665Y2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011023685A (en) * | 2009-07-21 | 2011-02-03 | Hitachi Kokusai Electric Inc | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
| JP2014212045A (en) * | 2013-04-19 | 2014-11-13 | 株式会社クリエイティブ テクノロジー | Planar heating element |
| JP2016171066A (en) * | 2015-03-09 | 2016-09-23 | 株式会社ニューフレアテクノロジー | Heater and semiconductor manufacturing device using the same |
| JP2019102135A (en) * | 2017-11-28 | 2019-06-24 | 京セラ株式会社 | heater |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001342071A (en) * | 2000-05-26 | 2001-12-11 | Shin Etsu Chem Co Ltd | Ceramic heater |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4949439U (en) * | 1972-08-05 | 1974-04-30 |
-
1977
- 1977-04-21 JP JP1977049515U patent/JPS5833665Y2/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4949439U (en) * | 1972-08-05 | 1974-04-30 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011023685A (en) * | 2009-07-21 | 2011-02-03 | Hitachi Kokusai Electric Inc | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
| JP2014212045A (en) * | 2013-04-19 | 2014-11-13 | 株式会社クリエイティブ テクノロジー | Planar heating element |
| JP2016171066A (en) * | 2015-03-09 | 2016-09-23 | 株式会社ニューフレアテクノロジー | Heater and semiconductor manufacturing device using the same |
| CN110034048A (en) * | 2015-03-09 | 2019-07-19 | 纽富来科技股份有限公司 | Heater and used its semiconductor device manufacturing device |
| CN110034048B (en) * | 2015-03-09 | 2023-05-26 | 纽富来科技股份有限公司 | Heater and apparatus for manufacturing semiconductor device using the same |
| JP2019102135A (en) * | 2017-11-28 | 2019-06-24 | 京セラ株式会社 | heater |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5833665Y2 (en) | 1983-07-27 |