JPS531396A - Electron beam evaporating device - Google Patents

Electron beam evaporating device

Info

Publication number
JPS531396A
JPS531396A JP7523076A JP7523076A JPS531396A JP S531396 A JPS531396 A JP S531396A JP 7523076 A JP7523076 A JP 7523076A JP 7523076 A JP7523076 A JP 7523076A JP S531396 A JPS531396 A JP S531396A
Authority
JP
Japan
Prior art keywords
electron beam
evaporating device
beam evaporating
electron
evaporating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7523076A
Other languages
Japanese (ja)
Inventor
Kikuo Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP7523076A priority Critical patent/JPS531396A/en
Publication of JPS531396A publication Critical patent/JPS531396A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7523076A 1976-06-25 1976-06-25 Electron beam evaporating device Pending JPS531396A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7523076A JPS531396A (en) 1976-06-25 1976-06-25 Electron beam evaporating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7523076A JPS531396A (en) 1976-06-25 1976-06-25 Electron beam evaporating device

Publications (1)

Publication Number Publication Date
JPS531396A true JPS531396A (en) 1978-01-09

Family

ID=13570205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7523076A Pending JPS531396A (en) 1976-06-25 1976-06-25 Electron beam evaporating device

Country Status (1)

Country Link
JP (1) JPS531396A (en)

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