JPS53138675A - Scan-type electronic microscope - Google Patents

Scan-type electronic microscope

Info

Publication number
JPS53138675A
JPS53138675A JP5393077A JP5393077A JPS53138675A JP S53138675 A JPS53138675 A JP S53138675A JP 5393077 A JP5393077 A JP 5393077A JP 5393077 A JP5393077 A JP 5393077A JP S53138675 A JPS53138675 A JP S53138675A
Authority
JP
Japan
Prior art keywords
scan
type electronic
electronic microscope
unevenness
variation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5393077A
Other languages
Japanese (ja)
Inventor
Masashi Otaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5393077A priority Critical patent/JPS53138675A/en
Publication of JPS53138675A publication Critical patent/JPS53138675A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To secure a simultaneous correction for both the reference level and the signal component, by correcting the unevenness of the electron beam or the unevenness of the detector through variation of the amplifying rate of the amplifier or variation of the detecting efficiency of the detector respectively.
COPYRIGHT: (C)1978,JPO&Japio
JP5393077A 1977-05-10 1977-05-10 Scan-type electronic microscope Pending JPS53138675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5393077A JPS53138675A (en) 1977-05-10 1977-05-10 Scan-type electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5393077A JPS53138675A (en) 1977-05-10 1977-05-10 Scan-type electronic microscope

Publications (1)

Publication Number Publication Date
JPS53138675A true JPS53138675A (en) 1978-12-04

Family

ID=12956440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5393077A Pending JPS53138675A (en) 1977-05-10 1977-05-10 Scan-type electronic microscope

Country Status (1)

Country Link
JP (1) JPS53138675A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140642A (en) * 1983-12-28 1985-07-25 Jeol Ltd Scanning electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140642A (en) * 1983-12-28 1985-07-25 Jeol Ltd Scanning electron microscope
JPH0234424B2 (en) * 1983-12-28 1990-08-03 Nippon Electron Optics Lab

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