JPS53135577A - Coating method of pmma resist - Google Patents
Coating method of pmma resistInfo
- Publication number
- JPS53135577A JPS53135577A JP5051477A JP5051477A JPS53135577A JP S53135577 A JPS53135577 A JP S53135577A JP 5051477 A JP5051477 A JP 5051477A JP 5051477 A JP5051477 A JP 5051477A JP S53135577 A JPS53135577 A JP S53135577A
- Authority
- JP
- Japan
- Prior art keywords
- coating method
- pmma resist
- resist
- ground
- pmma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
PURPOSE: To increase the adherence of resist and ground, by coating the resist of polymethyl methacrylate, after processing the ground of eteched material with hexamethyldisilazane.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5051477A JPS53135577A (en) | 1977-04-30 | 1977-04-30 | Coating method of pmma resist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5051477A JPS53135577A (en) | 1977-04-30 | 1977-04-30 | Coating method of pmma resist |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53135577A true JPS53135577A (en) | 1978-11-27 |
Family
ID=12861071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5051477A Pending JPS53135577A (en) | 1977-04-30 | 1977-04-30 | Coating method of pmma resist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53135577A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0605785A2 (en) * | 1992-11-25 | 1994-07-13 | Air Products And Chemicals, Inc. | Cleaning agents for removing metal-containing contaminants from integrated circuit assemblies and process for using the same |
-
1977
- 1977-04-30 JP JP5051477A patent/JPS53135577A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0605785A2 (en) * | 1992-11-25 | 1994-07-13 | Air Products And Chemicals, Inc. | Cleaning agents for removing metal-containing contaminants from integrated circuit assemblies and process for using the same |
EP0605785A3 (en) * | 1992-11-25 | 1994-11-02 | Air Prod & Chem | Cleaning agents for removing metal-containing contaminants from integrated circuit assemblies and process for using the same. |
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