JPS53135577A - Coating method of pmma resist - Google Patents

Coating method of pmma resist

Info

Publication number
JPS53135577A
JPS53135577A JP5051477A JP5051477A JPS53135577A JP S53135577 A JPS53135577 A JP S53135577A JP 5051477 A JP5051477 A JP 5051477A JP 5051477 A JP5051477 A JP 5051477A JP S53135577 A JPS53135577 A JP S53135577A
Authority
JP
Japan
Prior art keywords
coating method
pmma resist
resist
ground
pmma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5051477A
Other languages
Japanese (ja)
Inventor
Sumio Yamamoto
Yoshi Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5051477A priority Critical patent/JPS53135577A/en
Publication of JPS53135577A publication Critical patent/JPS53135577A/en
Pending legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

PURPOSE: To increase the adherence of resist and ground, by coating the resist of polymethyl methacrylate, after processing the ground of eteched material with hexamethyldisilazane.
COPYRIGHT: (C)1978,JPO&Japio
JP5051477A 1977-04-30 1977-04-30 Coating method of pmma resist Pending JPS53135577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5051477A JPS53135577A (en) 1977-04-30 1977-04-30 Coating method of pmma resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5051477A JPS53135577A (en) 1977-04-30 1977-04-30 Coating method of pmma resist

Publications (1)

Publication Number Publication Date
JPS53135577A true JPS53135577A (en) 1978-11-27

Family

ID=12861071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5051477A Pending JPS53135577A (en) 1977-04-30 1977-04-30 Coating method of pmma resist

Country Status (1)

Country Link
JP (1) JPS53135577A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0605785A2 (en) * 1992-11-25 1994-07-13 Air Products And Chemicals, Inc. Cleaning agents for removing metal-containing contaminants from integrated circuit assemblies and process for using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0605785A2 (en) * 1992-11-25 1994-07-13 Air Products And Chemicals, Inc. Cleaning agents for removing metal-containing contaminants from integrated circuit assemblies and process for using the same
EP0605785A3 (en) * 1992-11-25 1994-11-02 Air Prod & Chem Cleaning agents for removing metal-containing contaminants from integrated circuit assemblies and process for using the same.

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