JPS53134741A - Apparatus for surface treatment by glow dischares - Google Patents

Apparatus for surface treatment by glow dischares

Info

Publication number
JPS53134741A
JPS53134741A JP5004078A JP5004078A JPS53134741A JP S53134741 A JPS53134741 A JP S53134741A JP 5004078 A JP5004078 A JP 5004078A JP 5004078 A JP5004078 A JP 5004078A JP S53134741 A JPS53134741 A JP S53134741A
Authority
JP
Japan
Prior art keywords
surface treatment
glow
dischares
article
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5004078A
Other languages
Japanese (ja)
Other versions
JPS5526183B2 (en
Inventor
Naotatsu Asahi
Yasushi Ouchi
Tateo Tamamura
Shizuka Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5004078A priority Critical patent/JPS53134741A/en
Publication of JPS53134741A publication Critical patent/JPS53134741A/en
Publication of JPS5526183B2 publication Critical patent/JPS5526183B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Discharge Heating (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Furnace Details (AREA)

Abstract

PURPOSE:To provide an apparatus for surface treatment by glow discharges, which apparatus is provided within its furnace with intermediate walls between watercooled walls and an article to be treated so that temperature differential between article to be treated due to their mass differential will be leasened, and thereby a more uniform hardened layer is resulted and thermal efficiency is further improved.
JP5004078A 1978-04-28 1978-04-28 Apparatus for surface treatment by glow dischares Granted JPS53134741A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5004078A JPS53134741A (en) 1978-04-28 1978-04-28 Apparatus for surface treatment by glow dischares

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5004078A JPS53134741A (en) 1978-04-28 1978-04-28 Apparatus for surface treatment by glow dischares

Publications (2)

Publication Number Publication Date
JPS53134741A true JPS53134741A (en) 1978-11-24
JPS5526183B2 JPS5526183B2 (en) 1980-07-11

Family

ID=12847879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5004078A Granted JPS53134741A (en) 1978-04-28 1978-04-28 Apparatus for surface treatment by glow dischares

Country Status (1)

Country Link
JP (1) JPS53134741A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50158247U (en) * 1974-06-15 1975-12-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50158247U (en) * 1974-06-15 1975-12-27

Also Published As

Publication number Publication date
JPS5526183B2 (en) 1980-07-11

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