JPS5526183B2 - - Google Patents

Info

Publication number
JPS5526183B2
JPS5526183B2 JP5004078A JP5004078A JPS5526183B2 JP S5526183 B2 JPS5526183 B2 JP S5526183B2 JP 5004078 A JP5004078 A JP 5004078A JP 5004078 A JP5004078 A JP 5004078A JP S5526183 B2 JPS5526183 B2 JP S5526183B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5004078A
Other languages
Japanese (ja)
Other versions
JPS53134741A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5004078A priority Critical patent/JPS53134741A/en
Publication of JPS53134741A publication Critical patent/JPS53134741A/en
Publication of JPS5526183B2 publication Critical patent/JPS5526183B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Furnace Details (AREA)
  • Discharge Heating (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP5004078A 1978-04-28 1978-04-28 Apparatus for surface treatment by glow dischares Granted JPS53134741A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5004078A JPS53134741A (en) 1978-04-28 1978-04-28 Apparatus for surface treatment by glow dischares

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5004078A JPS53134741A (en) 1978-04-28 1978-04-28 Apparatus for surface treatment by glow dischares

Publications (2)

Publication Number Publication Date
JPS53134741A JPS53134741A (en) 1978-11-24
JPS5526183B2 true JPS5526183B2 (en) 1980-07-11

Family

ID=12847879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5004078A Granted JPS53134741A (en) 1978-04-28 1978-04-28 Apparatus for surface treatment by glow dischares

Country Status (1)

Country Link
JP (1) JPS53134741A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56556Y2 (en) * 1974-06-15 1981-01-08

Also Published As

Publication number Publication date
JPS53134741A (en) 1978-11-24

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