JPS53131762A - Molecular beam epitaxial growth apparatus - Google Patents

Molecular beam epitaxial growth apparatus

Info

Publication number
JPS53131762A
JPS53131762A JP4592977A JP4592977A JPS53131762A JP S53131762 A JPS53131762 A JP S53131762A JP 4592977 A JP4592977 A JP 4592977A JP 4592977 A JP4592977 A JP 4592977A JP S53131762 A JPS53131762 A JP S53131762A
Authority
JP
Japan
Prior art keywords
epitaxial growth
molecular beam
growth apparatus
beam epitaxial
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4592977A
Other languages
Japanese (ja)
Other versions
JPS5742209B2 (en
Inventor
Seihei Maekawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4592977A priority Critical patent/JPS53131762A/en
Publication of JPS53131762A publication Critical patent/JPS53131762A/en
Publication of JPS5742209B2 publication Critical patent/JPS5742209B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To make possible continuous substrate exchanging without breaking the vacuum of a growth chamber by removably mounting a pre-exhaust chamber to the epitaxial growth chamber through the cut-out valve provided in its wall part and putting in and out a substrate-exchanging support bar having an electromagnet for attraction fo a substrate support plate at its end through the valve port.
COPYRIGHT: (C)1978,JPO&Japio
JP4592977A 1977-04-22 1977-04-22 Molecular beam epitaxial growth apparatus Granted JPS53131762A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4592977A JPS53131762A (en) 1977-04-22 1977-04-22 Molecular beam epitaxial growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4592977A JPS53131762A (en) 1977-04-22 1977-04-22 Molecular beam epitaxial growth apparatus

Publications (2)

Publication Number Publication Date
JPS53131762A true JPS53131762A (en) 1978-11-16
JPS5742209B2 JPS5742209B2 (en) 1982-09-07

Family

ID=12732940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4592977A Granted JPS53131762A (en) 1977-04-22 1977-04-22 Molecular beam epitaxial growth apparatus

Country Status (1)

Country Link
JP (1) JPS53131762A (en)

Also Published As

Publication number Publication date
JPS5742209B2 (en) 1982-09-07

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