JPS53131762A - Molecular beam epitaxial growth apparatus - Google Patents
Molecular beam epitaxial growth apparatusInfo
- Publication number
- JPS53131762A JPS53131762A JP4592977A JP4592977A JPS53131762A JP S53131762 A JPS53131762 A JP S53131762A JP 4592977 A JP4592977 A JP 4592977A JP 4592977 A JP4592977 A JP 4592977A JP S53131762 A JPS53131762 A JP S53131762A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- molecular beam
- growth apparatus
- beam epitaxial
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE: To make possible continuous substrate exchanging without breaking the vacuum of a growth chamber by removably mounting a pre-exhaust chamber to the epitaxial growth chamber through the cut-out valve provided in its wall part and putting in and out a substrate-exchanging support bar having an electromagnet for attraction fo a substrate support plate at its end through the valve port.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4592977A JPS53131762A (en) | 1977-04-22 | 1977-04-22 | Molecular beam epitaxial growth apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4592977A JPS53131762A (en) | 1977-04-22 | 1977-04-22 | Molecular beam epitaxial growth apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53131762A true JPS53131762A (en) | 1978-11-16 |
JPS5742209B2 JPS5742209B2 (en) | 1982-09-07 |
Family
ID=12732940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4592977A Granted JPS53131762A (en) | 1977-04-22 | 1977-04-22 | Molecular beam epitaxial growth apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53131762A (en) |
-
1977
- 1977-04-22 JP JP4592977A patent/JPS53131762A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5742209B2 (en) | 1982-09-07 |
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