JPS5439567A - Electromagnetic lens - Google Patents
Electromagnetic lensInfo
- Publication number
- JPS5439567A JPS5439567A JP10640677A JP10640677A JPS5439567A JP S5439567 A JPS5439567 A JP S5439567A JP 10640677 A JP10640677 A JP 10640677A JP 10640677 A JP10640677 A JP 10640677A JP S5439567 A JPS5439567 A JP S5439567A
- Authority
- JP
- Japan
- Prior art keywords
- exciting current
- electromagnetic lens
- supplying
- lens
- given time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To establish new electromagent lens, by supplying the base exciting current to the electromagnetic lens for a given time at the changeover of the exciting current value and by supplying the specified exciting current changed over after a given time.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52106406A JPS5810818B2 (en) | 1977-09-05 | 1977-09-05 | electromagnetic lens device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52106406A JPS5810818B2 (en) | 1977-09-05 | 1977-09-05 | electromagnetic lens device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5439567A true JPS5439567A (en) | 1979-03-27 |
JPS5810818B2 JPS5810818B2 (en) | 1983-02-28 |
Family
ID=14432786
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52106406A Expired JPS5810818B2 (en) | 1977-09-05 | 1977-09-05 | electromagnetic lens device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5810818B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5760647A (en) * | 1980-09-26 | 1982-04-12 | Jeol Ltd | Magnetic field intensity control method |
JP2007242300A (en) * | 2006-03-06 | 2007-09-20 | Jeol Ltd | Hysteresis removal method using automatic transition button |
JP2008192521A (en) * | 2007-02-07 | 2008-08-21 | Hitachi High-Technologies Corp | Charged particle beam device |
JP2012018769A (en) * | 2010-07-06 | 2012-01-26 | Jeol Ltd | Focusing method for electron microscope and electron microscope |
-
1977
- 1977-09-05 JP JP52106406A patent/JPS5810818B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5760647A (en) * | 1980-09-26 | 1982-04-12 | Jeol Ltd | Magnetic field intensity control method |
JPS6248345B2 (en) * | 1980-09-26 | 1987-10-13 | Nippon Electron Optics Lab | |
JP2007242300A (en) * | 2006-03-06 | 2007-09-20 | Jeol Ltd | Hysteresis removal method using automatic transition button |
JP2008192521A (en) * | 2007-02-07 | 2008-08-21 | Hitachi High-Technologies Corp | Charged particle beam device |
JP2012018769A (en) * | 2010-07-06 | 2012-01-26 | Jeol Ltd | Focusing method for electron microscope and electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JPS5810818B2 (en) | 1983-02-28 |
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