JPS5439567A - Electromagnetic lens - Google Patents

Electromagnetic lens

Info

Publication number
JPS5439567A
JPS5439567A JP10640677A JP10640677A JPS5439567A JP S5439567 A JPS5439567 A JP S5439567A JP 10640677 A JP10640677 A JP 10640677A JP 10640677 A JP10640677 A JP 10640677A JP S5439567 A JPS5439567 A JP S5439567A
Authority
JP
Japan
Prior art keywords
exciting current
electromagnetic lens
supplying
lens
given time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10640677A
Other languages
Japanese (ja)
Other versions
JPS5810818B2 (en
Inventor
Setsuo Norioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP52106406A priority Critical patent/JPS5810818B2/en
Publication of JPS5439567A publication Critical patent/JPS5439567A/en
Publication of JPS5810818B2 publication Critical patent/JPS5810818B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To establish new electromagent lens, by supplying the base exciting current to the electromagnetic lens for a given time at the changeover of the exciting current value and by supplying the specified exciting current changed over after a given time.
COPYRIGHT: (C)1979,JPO&Japio
JP52106406A 1977-09-05 1977-09-05 electromagnetic lens device Expired JPS5810818B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52106406A JPS5810818B2 (en) 1977-09-05 1977-09-05 electromagnetic lens device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52106406A JPS5810818B2 (en) 1977-09-05 1977-09-05 electromagnetic lens device

Publications (2)

Publication Number Publication Date
JPS5439567A true JPS5439567A (en) 1979-03-27
JPS5810818B2 JPS5810818B2 (en) 1983-02-28

Family

ID=14432786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52106406A Expired JPS5810818B2 (en) 1977-09-05 1977-09-05 electromagnetic lens device

Country Status (1)

Country Link
JP (1) JPS5810818B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760647A (en) * 1980-09-26 1982-04-12 Jeol Ltd Magnetic field intensity control method
JP2007242300A (en) * 2006-03-06 2007-09-20 Jeol Ltd Hysteresis removal method using automatic transition button
JP2008192521A (en) * 2007-02-07 2008-08-21 Hitachi High-Technologies Corp Charged particle beam device
JP2012018769A (en) * 2010-07-06 2012-01-26 Jeol Ltd Focusing method for electron microscope and electron microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760647A (en) * 1980-09-26 1982-04-12 Jeol Ltd Magnetic field intensity control method
JPS6248345B2 (en) * 1980-09-26 1987-10-13 Nippon Electron Optics Lab
JP2007242300A (en) * 2006-03-06 2007-09-20 Jeol Ltd Hysteresis removal method using automatic transition button
JP2008192521A (en) * 2007-02-07 2008-08-21 Hitachi High-Technologies Corp Charged particle beam device
JP2012018769A (en) * 2010-07-06 2012-01-26 Jeol Ltd Focusing method for electron microscope and electron microscope

Also Published As

Publication number Publication date
JPS5810818B2 (en) 1983-02-28

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