JPS53129963A - Wafer appearance inspection apparatus - Google Patents

Wafer appearance inspection apparatus

Info

Publication number
JPS53129963A
JPS53129963A JP4445277A JP4445277A JPS53129963A JP S53129963 A JPS53129963 A JP S53129963A JP 4445277 A JP4445277 A JP 4445277A JP 4445277 A JP4445277 A JP 4445277A JP S53129963 A JPS53129963 A JP S53129963A
Authority
JP
Japan
Prior art keywords
inspection apparatus
appearance inspection
wafer appearance
wafer
simplifies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4445277A
Other languages
English (en)
Other versions
JPS5942978B2 (ja
Inventor
Tamotsu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4445277A priority Critical patent/JPS5942978B2/ja
Publication of JPS53129963A publication Critical patent/JPS53129963A/ja
Publication of JPS5942978B2 publication Critical patent/JPS5942978B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP4445277A 1977-04-20 1977-04-20 ウエ−ハ外観検査装置 Expired JPS5942978B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4445277A JPS5942978B2 (ja) 1977-04-20 1977-04-20 ウエ−ハ外観検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4445277A JPS5942978B2 (ja) 1977-04-20 1977-04-20 ウエ−ハ外観検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP16577185A Division JPS6144439A (ja) 1985-07-29 1985-07-29 ウエーハ外観検査装置

Publications (2)

Publication Number Publication Date
JPS53129963A true JPS53129963A (en) 1978-11-13
JPS5942978B2 JPS5942978B2 (ja) 1984-10-18

Family

ID=12691871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4445277A Expired JPS5942978B2 (ja) 1977-04-20 1977-04-20 ウエ−ハ外観検査装置

Country Status (1)

Country Link
JP (1) JPS5942978B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60157230A (ja) * 1984-01-11 1985-08-17 Telmec Co Ltd 半導体ウエハ搬送方法
JPH04218942A (ja) * 1991-03-23 1992-08-10 Tokyo Electron Ltd ウエハ検出装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60157230A (ja) * 1984-01-11 1985-08-17 Telmec Co Ltd 半導体ウエハ搬送方法
JPH0566734B2 (ja) * 1984-01-11 1993-09-22 Tokyo Electron Ltd
JPH04218942A (ja) * 1991-03-23 1992-08-10 Tokyo Electron Ltd ウエハ検出装置

Also Published As

Publication number Publication date
JPS5942978B2 (ja) 1984-10-18

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