JPS5312783B2 - - Google Patents

Info

Publication number
JPS5312783B2
JPS5312783B2 JP2293475A JP2293475A JPS5312783B2 JP S5312783 B2 JPS5312783 B2 JP S5312783B2 JP 2293475 A JP2293475 A JP 2293475A JP 2293475 A JP2293475 A JP 2293475A JP S5312783 B2 JPS5312783 B2 JP S5312783B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2293475A
Other languages
Japanese (ja)
Other versions
JPS5198953A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50022934A priority Critical patent/JPS5198953A/ja
Publication of JPS5198953A publication Critical patent/JPS5198953A/ja
Publication of JPS5312783B2 publication Critical patent/JPS5312783B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP50022934A 1975-02-26 1975-02-26 mos daioodono raifutaimu sokuteiho Granted JPS5198953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50022934A JPS5198953A (en) 1975-02-26 1975-02-26 mos daioodono raifutaimu sokuteiho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50022934A JPS5198953A (en) 1975-02-26 1975-02-26 mos daioodono raifutaimu sokuteiho

Publications (2)

Publication Number Publication Date
JPS5198953A JPS5198953A (en) 1976-08-31
JPS5312783B2 true JPS5312783B2 (enrdf_load_stackoverflow) 1978-05-04

Family

ID=12096448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50022934A Granted JPS5198953A (en) 1975-02-26 1975-02-26 mos daioodono raifutaimu sokuteiho

Country Status (1)

Country Link
JP (1) JPS5198953A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120370A (en) * 1977-03-30 1978-10-20 Agency Of Ind Science & Technol Measuring method of diffusion distance of minority carriers and its apparatus
JP3098680B2 (ja) * 1994-09-09 2000-10-16 三菱マテリアル株式会社 半導体ウェーハの内部欠陥の測定方法およびこれを用いた熱酸化炉の管理方法

Also Published As

Publication number Publication date
JPS5198953A (en) 1976-08-31

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