JPS53120273A - Manufacture of optical mask - Google Patents

Manufacture of optical mask

Info

Publication number
JPS53120273A
JPS53120273A JP3578777A JP3578777A JPS53120273A JP S53120273 A JPS53120273 A JP S53120273A JP 3578777 A JP3578777 A JP 3578777A JP 3578777 A JP3578777 A JP 3578777A JP S53120273 A JPS53120273 A JP S53120273A
Authority
JP
Japan
Prior art keywords
optical mask
manufacture
transmit
light
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3578777A
Other languages
Japanese (ja)
Inventor
Teruo Iino
Takayuki Yanagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3578777A priority Critical patent/JPS53120273A/en
Publication of JPS53120273A publication Critical patent/JPS53120273A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To increase extremely the resolving performance of the optical mask by providing an insulating thin layer which can transmit the light of a fixed wavelength as well as a light shielding pattern formed through condensation of the insulating particle on one main surface of a transparent substrate which can transmit the above mentioned light.
COPYRIGHT: (C)1978,JPO&Japio
JP3578777A 1977-03-29 1977-03-29 Manufacture of optical mask Pending JPS53120273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3578777A JPS53120273A (en) 1977-03-29 1977-03-29 Manufacture of optical mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3578777A JPS53120273A (en) 1977-03-29 1977-03-29 Manufacture of optical mask

Publications (1)

Publication Number Publication Date
JPS53120273A true JPS53120273A (en) 1978-10-20

Family

ID=12451612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3578777A Pending JPS53120273A (en) 1977-03-29 1977-03-29 Manufacture of optical mask

Country Status (1)

Country Link
JP (1) JPS53120273A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4704342A (en) * 1985-04-02 1987-11-03 Fairchild Semiconductor Corporation Photomask having a patterned carbon light-blocking coating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4704342A (en) * 1985-04-02 1987-11-03 Fairchild Semiconductor Corporation Photomask having a patterned carbon light-blocking coating

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