JPS5311830B2 - - Google Patents

Info

Publication number
JPS5311830B2
JPS5311830B2 JP3764176A JP3764176A JPS5311830B2 JP S5311830 B2 JPS5311830 B2 JP S5311830B2 JP 3764176 A JP3764176 A JP 3764176A JP 3764176 A JP3764176 A JP 3764176A JP S5311830 B2 JPS5311830 B2 JP S5311830B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3764176A
Other languages
Japanese (ja)
Other versions
JPS52122083A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3764176A priority Critical patent/JPS52122083A/ja
Publication of JPS52122083A publication Critical patent/JPS52122083A/ja
Publication of JPS5311830B2 publication Critical patent/JPS5311830B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP3764176A 1976-04-02 1976-04-02 Electron beam exposing device Granted JPS52122083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3764176A JPS52122083A (en) 1976-04-02 1976-04-02 Electron beam exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3764176A JPS52122083A (en) 1976-04-02 1976-04-02 Electron beam exposing device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4611977A Division JPS52120686A (en) 1977-04-21 1977-04-21 Electronic ray exposure method

Publications (2)

Publication Number Publication Date
JPS52122083A JPS52122083A (en) 1977-10-13
JPS5311830B2 true JPS5311830B2 (cs) 1978-04-25

Family

ID=12503266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3764176A Granted JPS52122083A (en) 1976-04-02 1976-04-02 Electron beam exposing device

Country Status (1)

Country Link
JP (1) JPS52122083A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52120686A (en) * 1977-04-21 1977-10-11 Jeol Ltd Electronic ray exposure method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6807439A (cs) * 1968-05-27 1969-12-01

Also Published As

Publication number Publication date
JPS52122083A (en) 1977-10-13

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