JPS53115290A - Measuring method of oxide concentration of object surface - Google Patents

Measuring method of oxide concentration of object surface

Info

Publication number
JPS53115290A
JPS53115290A JP3012777A JP3012777A JPS53115290A JP S53115290 A JPS53115290 A JP S53115290A JP 3012777 A JP3012777 A JP 3012777A JP 3012777 A JP3012777 A JP 3012777A JP S53115290 A JPS53115290 A JP S53115290A
Authority
JP
Japan
Prior art keywords
oxide concentration
measuring method
object surface
bonbardment
accuratly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3012777A
Other languages
Japanese (ja)
Other versions
JPS6027942B2 (en
Inventor
Kenji Kusao
Yoshiaki Yoshioka
Bunya Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP52030127A priority Critical patent/JPS6027942B2/en
Publication of JPS53115290A publication Critical patent/JPS53115290A/en
Publication of JPS6027942B2 publication Critical patent/JPS6027942B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To accuratly measure the oxide concentration of metal surface by obtaining the intensity of the secondary ions generated by specific ion beam bonbardment and the rate of its production.
JP52030127A 1977-03-17 1977-03-17 How to measure oxide concentration on the surface of an object Expired JPS6027942B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52030127A JPS6027942B2 (en) 1977-03-17 1977-03-17 How to measure oxide concentration on the surface of an object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52030127A JPS6027942B2 (en) 1977-03-17 1977-03-17 How to measure oxide concentration on the surface of an object

Publications (2)

Publication Number Publication Date
JPS53115290A true JPS53115290A (en) 1978-10-07
JPS6027942B2 JPS6027942B2 (en) 1985-07-02

Family

ID=12295100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52030127A Expired JPS6027942B2 (en) 1977-03-17 1977-03-17 How to measure oxide concentration on the surface of an object

Country Status (1)

Country Link
JP (1) JPS6027942B2 (en)

Also Published As

Publication number Publication date
JPS6027942B2 (en) 1985-07-02

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