JPS53115195A - Electrostrictive driving type specimen mover - Google Patents
Electrostrictive driving type specimen moverInfo
- Publication number
- JPS53115195A JPS53115195A JP2920677A JP2920677A JPS53115195A JP S53115195 A JPS53115195 A JP S53115195A JP 2920677 A JP2920677 A JP 2920677A JP 2920677 A JP2920677 A JP 2920677A JP S53115195 A JPS53115195 A JP S53115195A
- Authority
- JP
- Japan
- Prior art keywords
- driving type
- type specimen
- members
- specimen mover
- electrostrictive driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
PURPOSE: To reduce the number of members of shell members and slider members and make positive the contact between a specimen base and the slider members by providing common slider members on the point of intersection of an X axis and a Y axis in the case of arbitrarly moving the specimen base on a plane.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2920677A JPS53115195A (en) | 1977-03-18 | 1977-03-18 | Electrostrictive driving type specimen mover |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2920677A JPS53115195A (en) | 1977-03-18 | 1977-03-18 | Electrostrictive driving type specimen mover |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53115195A true JPS53115195A (en) | 1978-10-07 |
JPS5651513B2 JPS5651513B2 (en) | 1981-12-05 |
Family
ID=12269712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2920677A Granted JPS53115195A (en) | 1977-03-18 | 1977-03-18 | Electrostrictive driving type specimen mover |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53115195A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5134335A (en) * | 1987-11-25 | 1992-07-28 | Matsushita Electric Industrial Co., Ltd. | Linear actuator |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5112497A (en) * | 1974-07-22 | 1976-01-31 | Kyoritsu Kk | Chensoono hanpatsubooshisoochi |
-
1977
- 1977-03-18 JP JP2920677A patent/JPS53115195A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5112497A (en) * | 1974-07-22 | 1976-01-31 | Kyoritsu Kk | Chensoono hanpatsubooshisoochi |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5134335A (en) * | 1987-11-25 | 1992-07-28 | Matsushita Electric Industrial Co., Ltd. | Linear actuator |
Also Published As
Publication number | Publication date |
---|---|
JPS5651513B2 (en) | 1981-12-05 |
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