JPS53115195A - Electrostrictive driving type specimen mover - Google Patents

Electrostrictive driving type specimen mover

Info

Publication number
JPS53115195A
JPS53115195A JP2920677A JP2920677A JPS53115195A JP S53115195 A JPS53115195 A JP S53115195A JP 2920677 A JP2920677 A JP 2920677A JP 2920677 A JP2920677 A JP 2920677A JP S53115195 A JPS53115195 A JP S53115195A
Authority
JP
Japan
Prior art keywords
driving type
type specimen
members
specimen mover
electrostrictive driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2920677A
Other languages
Japanese (ja)
Other versions
JPS5651513B2 (en
Inventor
Kiyoshi Ishikawa
Yoshio Hokotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2920677A priority Critical patent/JPS53115195A/en
Publication of JPS53115195A publication Critical patent/JPS53115195A/en
Publication of JPS5651513B2 publication Critical patent/JPS5651513B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE: To reduce the number of members of shell members and slider members and make positive the contact between a specimen base and the slider members by providing common slider members on the point of intersection of an X axis and a Y axis in the case of arbitrarly moving the specimen base on a plane.
COPYRIGHT: (C)1978,JPO&Japio
JP2920677A 1977-03-18 1977-03-18 Electrostrictive driving type specimen mover Granted JPS53115195A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2920677A JPS53115195A (en) 1977-03-18 1977-03-18 Electrostrictive driving type specimen mover

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2920677A JPS53115195A (en) 1977-03-18 1977-03-18 Electrostrictive driving type specimen mover

Publications (2)

Publication Number Publication Date
JPS53115195A true JPS53115195A (en) 1978-10-07
JPS5651513B2 JPS5651513B2 (en) 1981-12-05

Family

ID=12269712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2920677A Granted JPS53115195A (en) 1977-03-18 1977-03-18 Electrostrictive driving type specimen mover

Country Status (1)

Country Link
JP (1) JPS53115195A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5134335A (en) * 1987-11-25 1992-07-28 Matsushita Electric Industrial Co., Ltd. Linear actuator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5112497A (en) * 1974-07-22 1976-01-31 Kyoritsu Kk Chensoono hanpatsubooshisoochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5112497A (en) * 1974-07-22 1976-01-31 Kyoritsu Kk Chensoono hanpatsubooshisoochi

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5134335A (en) * 1987-11-25 1992-07-28 Matsushita Electric Industrial Co., Ltd. Linear actuator

Also Published As

Publication number Publication date
JPS5651513B2 (en) 1981-12-05

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