JPS53114739A - Molding of metal for surface coating and their preparation - Google Patents

Molding of metal for surface coating and their preparation

Info

Publication number
JPS53114739A
JPS53114739A JP2925077A JP2925077A JPS53114739A JP S53114739 A JPS53114739 A JP S53114739A JP 2925077 A JP2925077 A JP 2925077A JP 2925077 A JP2925077 A JP 2925077A JP S53114739 A JPS53114739 A JP S53114739A
Authority
JP
Japan
Prior art keywords
metal
molding
preparation
surface coating
high purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2925077A
Other languages
Japanese (ja)
Other versions
JPS604241B2 (en
Inventor
Hiroshi Miyake
Satoru Tenma
Akira Honda
Yoshio Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Toyo Soda Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Soda Manufacturing Co Ltd filed Critical Toyo Soda Manufacturing Co Ltd
Priority to JP52029250A priority Critical patent/JPS604241B2/en
Publication of JPS53114739A publication Critical patent/JPS53114739A/en
Publication of JPS604241B2 publication Critical patent/JPS604241B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To prepare tough targets with a high purity for dry plating, by pressure molding powders of metal such as metallic chromiu m with a high purity.
JP52029250A 1977-03-18 1977-03-18 Metal moldings for surface coating materials Expired JPS604241B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52029250A JPS604241B2 (en) 1977-03-18 1977-03-18 Metal moldings for surface coating materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52029250A JPS604241B2 (en) 1977-03-18 1977-03-18 Metal moldings for surface coating materials

Publications (2)

Publication Number Publication Date
JPS53114739A true JPS53114739A (en) 1978-10-06
JPS604241B2 JPS604241B2 (en) 1985-02-02

Family

ID=12271010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52029250A Expired JPS604241B2 (en) 1977-03-18 1977-03-18 Metal moldings for surface coating materials

Country Status (1)

Country Link
JP (1) JPS604241B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61221361A (en) * 1985-03-26 1986-10-01 Mitsubishi Metal Corp Chromium target for sputtering
JPS62260056A (en) * 1986-05-07 1987-11-12 Hitachi Metals Ltd Chromium target member
JPH0525617A (en) * 1991-06-28 1993-02-02 Riken Corp Ion plating method
JPH05320885A (en) * 1992-05-19 1993-12-07 Riken Corp Evaporating material for ion plating

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61221361A (en) * 1985-03-26 1986-10-01 Mitsubishi Metal Corp Chromium target for sputtering
JPH0372709B2 (en) * 1985-03-26 1991-11-19 Mitsubishi Materials Corp
JPS62260056A (en) * 1986-05-07 1987-11-12 Hitachi Metals Ltd Chromium target member
JPH0448868B2 (en) * 1986-05-07 1992-08-07 Hitachi Metals Ltd
JPH0525617A (en) * 1991-06-28 1993-02-02 Riken Corp Ion plating method
JPH05320885A (en) * 1992-05-19 1993-12-07 Riken Corp Evaporating material for ion plating

Also Published As

Publication number Publication date
JPS604241B2 (en) 1985-02-02

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