JPS53110385A - Manufacture of ccd - Google Patents

Manufacture of ccd

Info

Publication number
JPS53110385A
JPS53110385A JP2559577A JP2559577A JPS53110385A JP S53110385 A JPS53110385 A JP S53110385A JP 2559577 A JP2559577 A JP 2559577A JP 2559577 A JP2559577 A JP 2559577A JP S53110385 A JPS53110385 A JP S53110385A
Authority
JP
Japan
Prior art keywords
ccd
manufacture
8mum
suited
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2559577A
Other languages
Japanese (ja)
Inventor
Takashi Osone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2559577A priority Critical patent/JPS53110385A/en
Publication of JPS53110385A publication Critical patent/JPS53110385A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268

Abstract

PURPOSE:To obtain a high-concentration CCD which is suited for the image sensor and the digital memory, by limiting the gate electrode length under 8mum per bit.
JP2559577A 1977-03-08 1977-03-08 Manufacture of ccd Pending JPS53110385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2559577A JPS53110385A (en) 1977-03-08 1977-03-08 Manufacture of ccd

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2559577A JPS53110385A (en) 1977-03-08 1977-03-08 Manufacture of ccd

Publications (1)

Publication Number Publication Date
JPS53110385A true JPS53110385A (en) 1978-09-27

Family

ID=12170250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2559577A Pending JPS53110385A (en) 1977-03-08 1977-03-08 Manufacture of ccd

Country Status (1)

Country Link
JP (1) JPS53110385A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5240873A (en) * 1991-09-14 1993-08-31 Gold Star Electronics Method of making charge transfer device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4929579A (en) * 1972-05-30 1974-03-16
JPS5020678A (en) * 1973-05-21 1975-03-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4929579A (en) * 1972-05-30 1974-03-16
JPS5020678A (en) * 1973-05-21 1975-03-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5240873A (en) * 1991-09-14 1993-08-31 Gold Star Electronics Method of making charge transfer device

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