JPS53108286A - Etching control device - Google Patents

Etching control device

Info

Publication number
JPS53108286A
JPS53108286A JP2348977A JP2348977A JPS53108286A JP S53108286 A JPS53108286 A JP S53108286A JP 2348977 A JP2348977 A JP 2348977A JP 2348977 A JP2348977 A JP 2348977A JP S53108286 A JPS53108286 A JP S53108286A
Authority
JP
Japan
Prior art keywords
control device
etching control
etching
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2348977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211492B2 (enExample
Inventor
Katsuzou Ukai
Kunio Hanazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDEN VARIAN KK
Original Assignee
NICHIDEN VARIAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDEN VARIAN KK filed Critical NICHIDEN VARIAN KK
Priority to JP2348977A priority Critical patent/JPS53108286A/ja
Publication of JPS53108286A publication Critical patent/JPS53108286A/ja
Publication of JPS6211492B2 publication Critical patent/JPS6211492B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP2348977A 1977-03-03 1977-03-03 Etching control device Granted JPS53108286A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2348977A JPS53108286A (en) 1977-03-03 1977-03-03 Etching control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2348977A JPS53108286A (en) 1977-03-03 1977-03-03 Etching control device

Publications (2)

Publication Number Publication Date
JPS53108286A true JPS53108286A (en) 1978-09-20
JPS6211492B2 JPS6211492B2 (enExample) 1987-03-12

Family

ID=12111915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2348977A Granted JPS53108286A (en) 1977-03-03 1977-03-03 Etching control device

Country Status (1)

Country Link
JP (1) JPS53108286A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723226A (en) * 1980-07-17 1982-02-06 Nippon Telegr & Teleph Corp <Ntt> Plasma etching device
JPS5759332A (en) * 1980-09-27 1982-04-09 Fujitsu Ltd Method for detecting finishing time of dry etching reaction
JPS57154147U (enExample) * 1981-03-20 1982-09-28
JPS5879722A (ja) * 1981-11-06 1983-05-13 Fujitsu Ltd プラズマエツチングの制御方法
JPS58215030A (ja) * 1982-06-08 1983-12-14 Kokusai Electric Co Ltd 半導体基板のドライエツチング終了時点検出装置
WO2018155425A1 (ja) * 2017-02-21 2018-08-30 株式会社アルバック 素子構造体の製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723226A (en) * 1980-07-17 1982-02-06 Nippon Telegr & Teleph Corp <Ntt> Plasma etching device
JPS5759332A (en) * 1980-09-27 1982-04-09 Fujitsu Ltd Method for detecting finishing time of dry etching reaction
JPS57154147U (enExample) * 1981-03-20 1982-09-28
JPS5879722A (ja) * 1981-11-06 1983-05-13 Fujitsu Ltd プラズマエツチングの制御方法
JPS58215030A (ja) * 1982-06-08 1983-12-14 Kokusai Electric Co Ltd 半導体基板のドライエツチング終了時点検出装置
WO2018155425A1 (ja) * 2017-02-21 2018-08-30 株式会社アルバック 素子構造体の製造方法
CN109892012A (zh) * 2017-02-21 2019-06-14 株式会社爱发科 元件结构体的制造方法

Also Published As

Publication number Publication date
JPS6211492B2 (enExample) 1987-03-12

Similar Documents

Publication Publication Date Title
JPS5349220A (en) Control device
JPS5495878A (en) Process control device
JPS52120380A (en) Contacttsensing control device
JPS5467379A (en) Spattering etching device
JPS5325703A (en) Control device
JPS53126147A (en) Switching control device
JPS5351377A (en) Control device
JPS5448327A (en) Control device
JPS543266A (en) Electronic control device
JPS53104085A (en) Condition controlling device
JPS5453434A (en) Actuator device
JPS548276A (en) Control device
JPS5427660A (en) Controlling device
JPS5470510A (en) Control device
JPS53102485A (en) Control device
JPS53147178A (en) Control device
GB2012583B (en) Sprinklersealing device
JPS5457909A (en) Switching control device
JPS5376431A (en) Control device
JPS53147582A (en) Calculation controlling device
JPS547080A (en) Control device
GB1539852A (en) Mechanism control device
GB1545654A (en) Control device
JPS5376284A (en) Control device
JPS5452985A (en) Etching device