JPS53107392A - Compound analyzer using excitation beam - Google Patents

Compound analyzer using excitation beam

Info

Publication number
JPS53107392A
JPS53107392A JP2198077A JP2198077A JPS53107392A JP S53107392 A JPS53107392 A JP S53107392A JP 2198077 A JP2198077 A JP 2198077A JP 2198077 A JP2198077 A JP 2198077A JP S53107392 A JPS53107392 A JP S53107392A
Authority
JP
Japan
Prior art keywords
excitation beam
excitation
compound analyzer
excitation beams
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2198077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS613067B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2198077A priority Critical patent/JPS53107392A/ja
Publication of JPS53107392A publication Critical patent/JPS53107392A/ja
Publication of JPS613067B2 publication Critical patent/JPS613067B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2198077A 1977-02-28 1977-02-28 Compound analyzer using excitation beam Granted JPS53107392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2198077A JPS53107392A (en) 1977-02-28 1977-02-28 Compound analyzer using excitation beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2198077A JPS53107392A (en) 1977-02-28 1977-02-28 Compound analyzer using excitation beam

Publications (2)

Publication Number Publication Date
JPS53107392A true JPS53107392A (en) 1978-09-19
JPS613067B2 JPS613067B2 (enrdf_load_stackoverflow) 1986-01-29

Family

ID=12070162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2198077A Granted JPS53107392A (en) 1977-02-28 1977-02-28 Compound analyzer using excitation beam

Country Status (1)

Country Link
JP (1) JPS53107392A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56138242A (en) * 1980-03-31 1981-10-28 Shimadzu Corp X-ray photoelectron analysis equipment
JPH02131650U (enrdf_load_stackoverflow) * 1989-12-07 1990-11-01

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56138242A (en) * 1980-03-31 1981-10-28 Shimadzu Corp X-ray photoelectron analysis equipment
JPH02131650U (enrdf_load_stackoverflow) * 1989-12-07 1990-11-01

Also Published As

Publication number Publication date
JPS613067B2 (enrdf_load_stackoverflow) 1986-01-29

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