JPS53100499A - Preparation of thin film pattern - Google Patents
Preparation of thin film patternInfo
- Publication number
- JPS53100499A JPS53100499A JP1514777A JP1514777A JPS53100499A JP S53100499 A JPS53100499 A JP S53100499A JP 1514777 A JP1514777 A JP 1514777A JP 1514777 A JP1514777 A JP 1514777A JP S53100499 A JPS53100499 A JP S53100499A
- Authority
- JP
- Japan
- Prior art keywords
- preparation
- thin film
- film pattern
- leveling
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To carry out leveling easily with high yield by forming metal film composed of two layers and previously side-etching one layer in leveling patterned surface of lower by lift-off method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1514777A JPS6058570B2 (en) | 1977-02-15 | 1977-02-15 | Thin film pattern formation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1514777A JPS6058570B2 (en) | 1977-02-15 | 1977-02-15 | Thin film pattern formation method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53100499A true JPS53100499A (en) | 1978-09-01 |
JPS6058570B2 JPS6058570B2 (en) | 1985-12-20 |
Family
ID=11880681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1514777A Expired JPS6058570B2 (en) | 1977-02-15 | 1977-02-15 | Thin film pattern formation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6058570B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0645771U (en) * | 1992-11-30 | 1994-06-21 | ぺんてる株式会社 | Fastener |
-
1977
- 1977-02-15 JP JP1514777A patent/JPS6058570B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6058570B2 (en) | 1985-12-20 |
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