JPS53100499A - Preparation of thin film pattern - Google Patents

Preparation of thin film pattern

Info

Publication number
JPS53100499A
JPS53100499A JP1514777A JP1514777A JPS53100499A JP S53100499 A JPS53100499 A JP S53100499A JP 1514777 A JP1514777 A JP 1514777A JP 1514777 A JP1514777 A JP 1514777A JP S53100499 A JPS53100499 A JP S53100499A
Authority
JP
Japan
Prior art keywords
preparation
thin film
film pattern
leveling
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1514777A
Other languages
Japanese (ja)
Other versions
JPS6058570B2 (en
Inventor
Mikio Segawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1514777A priority Critical patent/JPS6058570B2/en
Publication of JPS53100499A publication Critical patent/JPS53100499A/en
Publication of JPS6058570B2 publication Critical patent/JPS6058570B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE:To carry out leveling easily with high yield by forming metal film composed of two layers and previously side-etching one layer in leveling patterned surface of lower by lift-off method.
JP1514777A 1977-02-15 1977-02-15 Thin film pattern formation method Expired JPS6058570B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1514777A JPS6058570B2 (en) 1977-02-15 1977-02-15 Thin film pattern formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1514777A JPS6058570B2 (en) 1977-02-15 1977-02-15 Thin film pattern formation method

Publications (2)

Publication Number Publication Date
JPS53100499A true JPS53100499A (en) 1978-09-01
JPS6058570B2 JPS6058570B2 (en) 1985-12-20

Family

ID=11880681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1514777A Expired JPS6058570B2 (en) 1977-02-15 1977-02-15 Thin film pattern formation method

Country Status (1)

Country Link
JP (1) JPS6058570B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645771U (en) * 1992-11-30 1994-06-21 ぺんてる株式会社 Fastener

Also Published As

Publication number Publication date
JPS6058570B2 (en) 1985-12-20

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