JPS53100193A - Silicon tetrachloride purifying method - Google Patents

Silicon tetrachloride purifying method

Info

Publication number
JPS53100193A
JPS53100193A JP1485777A JP1485777A JPS53100193A JP S53100193 A JPS53100193 A JP S53100193A JP 1485777 A JP1485777 A JP 1485777A JP 1485777 A JP1485777 A JP 1485777A JP S53100193 A JPS53100193 A JP S53100193A
Authority
JP
Japan
Prior art keywords
silicon tetrachloride
purifying method
tetrachloride purifying
sicl
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1485777A
Other languages
English (en)
Other versions
JPS5645855B2 (ja
Inventor
Minoru Takamizawa
Haruo Okamoto
Mitsuo Umemura
Kazuo Kamiya
Masaaki Aoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP1485777A priority Critical patent/JPS53100193A/ja
Priority to DE19782805824 priority patent/DE2805824A1/de
Publication of JPS53100193A publication Critical patent/JPS53100193A/ja
Publication of JPS5645855B2 publication Critical patent/JPS5645855B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
JP1485777A 1977-02-14 1977-02-14 Silicon tetrachloride purifying method Granted JPS53100193A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1485777A JPS53100193A (en) 1977-02-14 1977-02-14 Silicon tetrachloride purifying method
DE19782805824 DE2805824A1 (de) 1977-02-14 1978-02-11 Verfahren zur reinigung von siliziumtetrachlorid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1485777A JPS53100193A (en) 1977-02-14 1977-02-14 Silicon tetrachloride purifying method

Publications (2)

Publication Number Publication Date
JPS53100193A true JPS53100193A (en) 1978-09-01
JPS5645855B2 JPS5645855B2 (ja) 1981-10-29

Family

ID=11872690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1485777A Granted JPS53100193A (en) 1977-02-14 1977-02-14 Silicon tetrachloride purifying method

Country Status (2)

Country Link
JP (1) JPS53100193A (ja)
DE (1) DE2805824A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104058410A (zh) * 2014-06-26 2014-09-24 中国恩菲工程技术有限公司 纯化四氯化硅的系统

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4310341A (en) * 1980-09-12 1982-01-12 Bell Telephone Laboratories, Incorporated Removal of --OH impurities from fiber optic precursor materials
DE3502367A1 (de) * 1985-01-25 1986-07-31 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zum entfernen von wasserstoff aus in siliziumtetrachlorid oder germaniumtetrachlorid geloesten wasserstoffhaltigen verbindungen
US4927621A (en) * 1989-01-27 1990-05-22 The Dow Chemical Company Purification of anhydrous hydrogen chloride
US4985579A (en) * 1989-10-16 1991-01-15 Dow Corning Corporation Removal of hydrogen-containing silanes from organosilane mixtures
JP2867696B2 (ja) * 1990-11-29 1999-03-08 信越化学工業株式会社 四塩化ケイ素の精製方法
NL1019371C2 (nl) * 2001-11-15 2003-05-16 Draka Fibre Technology Bv Werkwijze voor het bereiden van zeer zuiver siliciumchloride en/of germaniumchloride.
CN106219551B (zh) * 2016-07-06 2018-01-12 成都蜀菱科技发展有限公司 高纯度四氯化硅的提纯方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104058410A (zh) * 2014-06-26 2014-09-24 中国恩菲工程技术有限公司 纯化四氯化硅的系统

Also Published As

Publication number Publication date
DE2805824A1 (de) 1978-08-17
JPS5645855B2 (ja) 1981-10-29

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