JPS5298067U - - Google Patents
Info
- Publication number
- JPS5298067U JPS5298067U JP561176U JP561176U JPS5298067U JP S5298067 U JPS5298067 U JP S5298067U JP 561176 U JP561176 U JP 561176U JP 561176 U JP561176 U JP 561176U JP S5298067 U JPS5298067 U JP S5298067U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Mutual Connection Of Rods And Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP561176U JPS5335640Y2 (en:Method) | 1976-01-23 | 1976-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP561176U JPS5335640Y2 (en:Method) | 1976-01-23 | 1976-01-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5298067U true JPS5298067U (en:Method) | 1977-07-23 |
| JPS5335640Y2 JPS5335640Y2 (en:Method) | 1978-08-31 |
Family
ID=28466234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP561176U Expired JPS5335640Y2 (en:Method) | 1976-01-23 | 1976-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5335640Y2 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010110868A (ja) * | 2008-11-07 | 2010-05-20 | Ulvac Japan Ltd | 基板搬送装置 |
| WO2011092929A1 (ja) * | 2010-01-26 | 2011-08-04 | 株式会社フジキン | 流体制御器および流量制御装置 |
| JP2017221478A (ja) * | 2016-06-16 | 2017-12-21 | ホーチキ株式会社 | 放水銃装置 |
-
1976
- 1976-01-23 JP JP561176U patent/JPS5335640Y2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010110868A (ja) * | 2008-11-07 | 2010-05-20 | Ulvac Japan Ltd | 基板搬送装置 |
| WO2011092929A1 (ja) * | 2010-01-26 | 2011-08-04 | 株式会社フジキン | 流体制御器および流量制御装置 |
| US9163748B2 (en) | 2010-01-26 | 2015-10-20 | Fujikin Incorporated | Fluid control device and flow rate control apparatus |
| DE112010005186B4 (de) | 2010-01-26 | 2020-05-28 | Fujikin Incorporated | Fluidsteuervorrichtung und Volumenstromregelungseinrichtung |
| JP2017221478A (ja) * | 2016-06-16 | 2017-12-21 | ホーチキ株式会社 | 放水銃装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5335640Y2 (en:Method) | 1978-08-31 |