JPS529508B2 - - Google Patents

Info

Publication number
JPS529508B2
JPS529508B2 JP9807272A JP9807272A JPS529508B2 JP S529508 B2 JPS529508 B2 JP S529508B2 JP 9807272 A JP9807272 A JP 9807272A JP 9807272 A JP9807272 A JP 9807272A JP S529508 B2 JPS529508 B2 JP S529508B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9807272A
Other languages
Japanese (ja)
Other versions
JPS4967575A (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9807272A priority Critical patent/JPS529508B2/ja
Publication of JPS4967575A publication Critical patent/JPS4967575A/ja
Publication of JPS529508B2 publication Critical patent/JPS529508B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP9807272A 1972-10-02 1972-10-02 Expired JPS529508B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9807272A JPS529508B2 (cg-RX-API-DMAC7.html) 1972-10-02 1972-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9807272A JPS529508B2 (cg-RX-API-DMAC7.html) 1972-10-02 1972-10-02

Publications (2)

Publication Number Publication Date
JPS4967575A JPS4967575A (cg-RX-API-DMAC7.html) 1974-07-01
JPS529508B2 true JPS529508B2 (cg-RX-API-DMAC7.html) 1977-03-16

Family

ID=14210128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9807272A Expired JPS529508B2 (cg-RX-API-DMAC7.html) 1972-10-02 1972-10-02

Country Status (1)

Country Link
JP (1) JPS529508B2 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5341075B2 (cg-RX-API-DMAC7.html) * 1974-12-27 1978-10-31
JPS52120562A (en) * 1976-04-02 1977-10-11 Mitsubishi Electric Corp Removing method of micro-particle
JPS53120377A (en) * 1977-03-30 1978-10-20 Nec Corp Laser machining apparatus for correction of photo masks
EP0165685B1 (en) * 1984-06-20 1992-09-23 Gould Inc. Laser-based system for the total repair of photomasks

Also Published As

Publication number Publication date
JPS4967575A (cg-RX-API-DMAC7.html) 1974-07-01

Similar Documents

Publication Publication Date Title
JPS4947499A (cg-RX-API-DMAC7.html)
JPS49101077A (cg-RX-API-DMAC7.html)
FR2216965B1 (cg-RX-API-DMAC7.html)
JPS496218U (cg-RX-API-DMAC7.html)
JPS5619972B2 (cg-RX-API-DMAC7.html)
JPS4991738A (cg-RX-API-DMAC7.html)
JPS5550799Y2 (cg-RX-API-DMAC7.html)
JPS4899229U (cg-RX-API-DMAC7.html)
JPS503910A (cg-RX-API-DMAC7.html)
JPS48103884U (cg-RX-API-DMAC7.html)
JPS4940568A (cg-RX-API-DMAC7.html)
BG18961A1 (cg-RX-API-DMAC7.html)
CH562985A5 (cg-RX-API-DMAC7.html)
CH583233A5 (cg-RX-API-DMAC7.html)
SE7205621L (cg-RX-API-DMAC7.html)
AU480708A (cg-RX-API-DMAC7.html)
BG18194A1 (cg-RX-API-DMAC7.html)
BG18198A1 (cg-RX-API-DMAC7.html)
BG18222A1 (cg-RX-API-DMAC7.html)
BG18270A1 (cg-RX-API-DMAC7.html)
BG18315A1 (cg-RX-API-DMAC7.html)
BG18632A1 (cg-RX-API-DMAC7.html)
BG18717A1 (cg-RX-API-DMAC7.html)
BG18906A1 (cg-RX-API-DMAC7.html)
CH583094A5 (cg-RX-API-DMAC7.html)