JPS529459A - Fine adjustment device - Google Patents

Fine adjustment device

Info

Publication number
JPS529459A
JPS529459A JP8539375A JP8539375A JPS529459A JP S529459 A JPS529459 A JP S529459A JP 8539375 A JP8539375 A JP 8539375A JP 8539375 A JP8539375 A JP 8539375A JP S529459 A JPS529459 A JP S529459A
Authority
JP
Japan
Prior art keywords
adjustment device
fine adjustment
linearity
high accuracy
achieve high
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8539375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS574841B2 (enrdf_load_stackoverflow
Inventor
Toshishige Kurosaki
Akihiro Takanashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8539375A priority Critical patent/JPS529459A/ja
Publication of JPS529459A publication Critical patent/JPS529459A/ja
Publication of JPS574841B2 publication Critical patent/JPS574841B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Microscoopes, Condenser (AREA)
  • Control Of Position Or Direction (AREA)
JP8539375A 1975-07-14 1975-07-14 Fine adjustment device Granted JPS529459A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8539375A JPS529459A (en) 1975-07-14 1975-07-14 Fine adjustment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8539375A JPS529459A (en) 1975-07-14 1975-07-14 Fine adjustment device

Publications (2)

Publication Number Publication Date
JPS529459A true JPS529459A (en) 1977-01-25
JPS574841B2 JPS574841B2 (enrdf_load_stackoverflow) 1982-01-27

Family

ID=13857511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8539375A Granted JPS529459A (en) 1975-07-14 1975-07-14 Fine adjustment device

Country Status (1)

Country Link
JP (1) JPS529459A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS574841B2 (enrdf_load_stackoverflow) 1982-01-27

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