JPS529353B2 - - Google Patents

Info

Publication number
JPS529353B2
JPS529353B2 JP3885572A JP3885572A JPS529353B2 JP S529353 B2 JPS529353 B2 JP S529353B2 JP 3885572 A JP3885572 A JP 3885572A JP 3885572 A JP3885572 A JP 3885572A JP S529353 B2 JPS529353 B2 JP S529353B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3885572A
Other languages
Japanese (ja)
Other versions
JPS492482A (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3885572A priority Critical patent/JPS529353B2/ja
Publication of JPS492482A publication Critical patent/JPS492482A/ja
Publication of JPS529353B2 publication Critical patent/JPS529353B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Electrodes Of Semiconductors (AREA)
JP3885572A 1972-04-18 1972-04-18 Expired JPS529353B2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3885572A JPS529353B2 (xx) 1972-04-18 1972-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3885572A JPS529353B2 (xx) 1972-04-18 1972-04-18

Publications (2)

Publication Number Publication Date
JPS492482A JPS492482A (xx) 1974-01-10
JPS529353B2 true JPS529353B2 (xx) 1977-03-15

Family

ID=12536801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3885572A Expired JPS529353B2 (xx) 1972-04-18 1972-04-18

Country Status (1)

Country Link
JP (1) JPS529353B2 (xx)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135639A (ja) * 1974-09-20 1976-03-26 Hitachi Ltd Himakunopurazumaetsuchingushorishutenkenshutsuho
JPS5421711B2 (xx) * 1975-01-20 1979-08-01
JPS5211176A (en) * 1975-07-18 1977-01-27 Toshiba Corp Activation gas reaction apparatus
CA1071579A (en) * 1976-09-13 1980-02-12 Northern Telecom Limited End point control in plasma etching
JPS5384466A (en) * 1976-12-29 1978-07-25 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
US4211601A (en) * 1978-07-31 1980-07-08 Bell Telephone Laboratories, Incorporated Device fabrication by plasma etching
JPS56105631A (en) * 1980-01-25 1981-08-22 Mitsubishi Electric Corp Electrode formation of semiconductor device
JPS62145732A (ja) * 1985-12-20 1987-06-29 Hitachi Ltd エツチング法

Also Published As

Publication number Publication date
JPS492482A (xx) 1974-01-10

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