JPS5283419A - Preparation of methylchlorosilanes - Google Patents

Preparation of methylchlorosilanes

Info

Publication number
JPS5283419A
JPS5283419A JP15644375A JP15644375A JPS5283419A JP S5283419 A JPS5283419 A JP S5283419A JP 15644375 A JP15644375 A JP 15644375A JP 15644375 A JP15644375 A JP 15644375A JP S5283419 A JPS5283419 A JP S5283419A
Authority
JP
Japan
Prior art keywords
methylchlorosilanes
preparation
methyldichlorosilane
disilane
dimethyldichlorosilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15644375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5526150B2 (enExample
Inventor
Haruo Okamoto
Masaaki Aoyama
Shigeru Yokoi
Kiichi Habata
Shinichi Hisatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP15644375A priority Critical patent/JPS5283419A/ja
Publication of JPS5283419A publication Critical patent/JPS5283419A/ja
Publication of JPS5526150B2 publication Critical patent/JPS5526150B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
JP15644375A 1975-12-29 1975-12-29 Preparation of methylchlorosilanes Granted JPS5283419A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15644375A JPS5283419A (en) 1975-12-29 1975-12-29 Preparation of methylchlorosilanes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15644375A JPS5283419A (en) 1975-12-29 1975-12-29 Preparation of methylchlorosilanes

Publications (2)

Publication Number Publication Date
JPS5283419A true JPS5283419A (en) 1977-07-12
JPS5526150B2 JPS5526150B2 (enExample) 1980-07-11

Family

ID=15627851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15644375A Granted JPS5283419A (en) 1975-12-29 1975-12-29 Preparation of methylchlorosilanes

Country Status (1)

Country Link
JP (1) JPS5283419A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102516285A (zh) * 2011-11-09 2012-06-27 江苏宏达新材料股份有限公司 一种连续法催化裂解有机硅高沸物的方法
CN102558215A (zh) * 2011-12-31 2012-07-11 蓝星化工新材料股份有限公司江西星火有机硅厂 一种有机硅高沸裂解的工艺
JP2013542168A (ja) * 2010-11-09 2013-11-21 エボニック デグサ ゲーエムベーハー 高次シランの選択的分解法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106145119B (zh) * 2016-06-25 2018-02-27 浙江迅鼎半导体材料科技有限公司 一种乙硅烷反应釜
CN106115718B (zh) * 2016-06-25 2017-11-21 浙江迅鼎半导体材料科技有限公司 一种乙硅烷生产装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013542168A (ja) * 2010-11-09 2013-11-21 エボニック デグサ ゲーエムベーハー 高次シランの選択的分解法
CN102516285A (zh) * 2011-11-09 2012-06-27 江苏宏达新材料股份有限公司 一种连续法催化裂解有机硅高沸物的方法
CN102558215A (zh) * 2011-12-31 2012-07-11 蓝星化工新材料股份有限公司江西星火有机硅厂 一种有机硅高沸裂解的工艺

Also Published As

Publication number Publication date
JPS5526150B2 (enExample) 1980-07-11

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