JPS5283419A - Preparation of methylchlorosilanes - Google Patents
Preparation of methylchlorosilanesInfo
- Publication number
- JPS5283419A JPS5283419A JP15644375A JP15644375A JPS5283419A JP S5283419 A JPS5283419 A JP S5283419A JP 15644375 A JP15644375 A JP 15644375A JP 15644375 A JP15644375 A JP 15644375A JP S5283419 A JPS5283419 A JP S5283419A
- Authority
- JP
- Japan
- Prior art keywords
- methylchlorosilanes
- preparation
- methyldichlorosilane
- disilane
- dimethyldichlorosilane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15644375A JPS5283419A (en) | 1975-12-29 | 1975-12-29 | Preparation of methylchlorosilanes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15644375A JPS5283419A (en) | 1975-12-29 | 1975-12-29 | Preparation of methylchlorosilanes |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5283419A true JPS5283419A (en) | 1977-07-12 |
JPS5526150B2 JPS5526150B2 (ja) | 1980-07-11 |
Family
ID=15627851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15644375A Granted JPS5283419A (en) | 1975-12-29 | 1975-12-29 | Preparation of methylchlorosilanes |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5283419A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102516285A (zh) * | 2011-11-09 | 2012-06-27 | 江苏宏达新材料股份有限公司 | 一种连续法催化裂解有机硅高沸物的方法 |
CN102558215A (zh) * | 2011-12-31 | 2012-07-11 | 蓝星化工新材料股份有限公司江西星火有机硅厂 | 一种有机硅高沸裂解的工艺 |
JP2013542168A (ja) * | 2010-11-09 | 2013-11-21 | エボニック デグサ ゲーエムベーハー | 高次シランの選択的分解法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106145119B (zh) * | 2016-06-25 | 2018-02-27 | 浙江迅鼎半导体材料科技有限公司 | 一种乙硅烷反应釜 |
CN106115718B (zh) * | 2016-06-25 | 2017-11-21 | 浙江迅鼎半导体材料科技有限公司 | 一种乙硅烷生产装置 |
-
1975
- 1975-12-29 JP JP15644375A patent/JPS5283419A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013542168A (ja) * | 2010-11-09 | 2013-11-21 | エボニック デグサ ゲーエムベーハー | 高次シランの選択的分解法 |
CN102516285A (zh) * | 2011-11-09 | 2012-06-27 | 江苏宏达新材料股份有限公司 | 一种连续法催化裂解有机硅高沸物的方法 |
CN102558215A (zh) * | 2011-12-31 | 2012-07-11 | 蓝星化工新材料股份有限公司江西星火有机硅厂 | 一种有机硅高沸裂解的工艺 |
Also Published As
Publication number | Publication date |
---|---|
JPS5526150B2 (ja) | 1980-07-11 |
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