JPS5277725A - Automatic exposure circuit - Google Patents

Automatic exposure circuit

Info

Publication number
JPS5277725A
JPS5277725A JP50153330A JP15333075A JPS5277725A JP S5277725 A JPS5277725 A JP S5277725A JP 50153330 A JP50153330 A JP 50153330A JP 15333075 A JP15333075 A JP 15333075A JP S5277725 A JPS5277725 A JP S5277725A
Authority
JP
Japan
Prior art keywords
automatic exposure
exposure circuit
comparator
ultra
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50153330A
Other languages
Japanese (ja)
Inventor
Tetsuzo Tanimoto
Hiroshi Makihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50153330A priority Critical patent/JPS5277725A/en
Publication of JPS5277725A publication Critical patent/JPS5277725A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Exposure In Printing And Copying (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To prevent a desired exposure time by comparing an integrated value of an out put of a light receptor element having sensitivity in the ultra-violet ray region and a reference value fed from a digital switch, and by detecting a reference intensity of illumination by an output of a comparator.
COPYRIGHT: (C)1977,JPO&Japio
JP50153330A 1975-12-24 1975-12-24 Automatic exposure circuit Pending JPS5277725A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50153330A JPS5277725A (en) 1975-12-24 1975-12-24 Automatic exposure circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50153330A JPS5277725A (en) 1975-12-24 1975-12-24 Automatic exposure circuit

Publications (1)

Publication Number Publication Date
JPS5277725A true JPS5277725A (en) 1977-06-30

Family

ID=15560122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50153330A Pending JPS5277725A (en) 1975-12-24 1975-12-24 Automatic exposure circuit

Country Status (1)

Country Link
JP (1) JPS5277725A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673437A (en) * 1979-11-20 1981-06-18 Fujitsu Ltd Far-ultraviolet light exposing method and device
JPS57141923A (en) * 1981-02-27 1982-09-02 Hitachi Ltd Projection type exposure device
JPS5950519A (en) * 1982-09-16 1984-03-23 Hitachi Ltd Control of photo resist process
JPS59201418A (en) * 1983-04-30 1984-11-15 Toshiba Corp Exposing apparatus
JPS59182966U (en) * 1983-05-20 1984-12-06 ソニー株式会社 Ceramic multilayer circuit board
WO1986002440A1 (en) * 1984-10-18 1986-04-24 Matsushita Electric Works, Ltd. Photoelectric position detector circuit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4920535B1 (en) * 1970-12-30 1974-05-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4920535B1 (en) * 1970-12-30 1974-05-25

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673437A (en) * 1979-11-20 1981-06-18 Fujitsu Ltd Far-ultraviolet light exposing method and device
JPS6231490B2 (en) * 1979-11-20 1987-07-08 Fujitsu Ltd
JPS57141923A (en) * 1981-02-27 1982-09-02 Hitachi Ltd Projection type exposure device
JPS5950519A (en) * 1982-09-16 1984-03-23 Hitachi Ltd Control of photo resist process
JPS59201418A (en) * 1983-04-30 1984-11-15 Toshiba Corp Exposing apparatus
JPH0141246B2 (en) * 1983-04-30 1989-09-04 Tokyo Shibaura Electric Co
JPS59182966U (en) * 1983-05-20 1984-12-06 ソニー株式会社 Ceramic multilayer circuit board
JPH0129801Y2 (en) * 1983-05-20 1989-09-11
WO1986002440A1 (en) * 1984-10-18 1986-04-24 Matsushita Electric Works, Ltd. Photoelectric position detector circuit

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