JPS5274291A - Production of pressure transducer - Google Patents

Production of pressure transducer

Info

Publication number
JPS5274291A
JPS5274291A JP50151416A JP15141675A JPS5274291A JP S5274291 A JPS5274291 A JP S5274291A JP 50151416 A JP50151416 A JP 50151416A JP 15141675 A JP15141675 A JP 15141675A JP S5274291 A JPS5274291 A JP S5274291A
Authority
JP
Japan
Prior art keywords
production
pressure transducer
pressure resistant
thinffilm
varying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50151416A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5515105B2 (enExample
Inventor
Nobuyoshi Taguchi
Koji Matsuo
Hiroshi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50151416A priority Critical patent/JPS5274291A/ja
Publication of JPS5274291A publication Critical patent/JPS5274291A/ja
Publication of JPS5515105B2 publication Critical patent/JPS5515105B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP50151416A 1975-12-17 1975-12-17 Production of pressure transducer Granted JPS5274291A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50151416A JPS5274291A (en) 1975-12-17 1975-12-17 Production of pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50151416A JPS5274291A (en) 1975-12-17 1975-12-17 Production of pressure transducer

Publications (2)

Publication Number Publication Date
JPS5274291A true JPS5274291A (en) 1977-06-22
JPS5515105B2 JPS5515105B2 (enExample) 1980-04-21

Family

ID=15518124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50151416A Granted JPS5274291A (en) 1975-12-17 1975-12-17 Production of pressure transducer

Country Status (1)

Country Link
JP (1) JPS5274291A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0324962U (enExample) * 1989-07-18 1991-03-14

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871980A (enExample) * 1971-12-28 1973-09-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871980A (enExample) * 1971-12-28 1973-09-28

Also Published As

Publication number Publication date
JPS5515105B2 (enExample) 1980-04-21

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