JPS4871980A - - Google Patents

Info

Publication number
JPS4871980A
JPS4871980A JP128972A JP128972A JPS4871980A JP S4871980 A JPS4871980 A JP S4871980A JP 128972 A JP128972 A JP 128972A JP 128972 A JP128972 A JP 128972A JP S4871980 A JPS4871980 A JP S4871980A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP128972A
Other languages
Japanese (ja)
Other versions
JPS5313957B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP128972A priority Critical patent/JPS5313957B2/ja
Publication of JPS4871980A publication Critical patent/JPS4871980A/ja
Publication of JPS5313957B2 publication Critical patent/JPS5313957B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
JP128972A 1971-12-28 1971-12-28 Expired JPS5313957B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP128972A JPS5313957B2 (enExample) 1971-12-28 1971-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP128972A JPS5313957B2 (enExample) 1971-12-28 1971-12-28

Publications (2)

Publication Number Publication Date
JPS4871980A true JPS4871980A (enExample) 1973-09-28
JPS5313957B2 JPS5313957B2 (enExample) 1978-05-13

Family

ID=11497281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP128972A Expired JPS5313957B2 (enExample) 1971-12-28 1971-12-28

Country Status (1)

Country Link
JP (1) JPS5313957B2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5273683A (en) * 1975-12-16 1977-06-20 Matsushita Electric Ind Co Ltd Semiconductor thin film pressure transducer
JPS5273684A (en) * 1975-12-16 1977-06-20 Matsushita Electric Ind Co Ltd Semiconductor thin film pressure resistive element
JPS5274291A (en) * 1975-12-17 1977-06-22 Matsushita Electric Ind Co Ltd Production of pressure transducer

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6441008U (enExample) * 1987-05-11 1989-03-10

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5273683A (en) * 1975-12-16 1977-06-20 Matsushita Electric Ind Co Ltd Semiconductor thin film pressure transducer
JPS5273684A (en) * 1975-12-16 1977-06-20 Matsushita Electric Ind Co Ltd Semiconductor thin film pressure resistive element
JPS5274291A (en) * 1975-12-17 1977-06-22 Matsushita Electric Ind Co Ltd Production of pressure transducer

Also Published As

Publication number Publication date
JPS5313957B2 (enExample) 1978-05-13

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