JPS5272340A - Device for gaseous phase etching - Google Patents

Device for gaseous phase etching

Info

Publication number
JPS5272340A
JPS5272340A JP14885275A JP14885275A JPS5272340A JP S5272340 A JPS5272340 A JP S5272340A JP 14885275 A JP14885275 A JP 14885275A JP 14885275 A JP14885275 A JP 14885275A JP S5272340 A JPS5272340 A JP S5272340A
Authority
JP
Japan
Prior art keywords
gaseous phase
phase etching
etching
gaseous
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14885275A
Other languages
Japanese (ja)
Other versions
JPS5741553B2 (en
Inventor
Haruhiko Abe
Akira Nishimoto
Kuniaki Miyake
Yumiko Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14885275A priority Critical patent/JPS5272340A/en
Publication of JPS5272340A publication Critical patent/JPS5272340A/en
Publication of JPS5741553B2 publication Critical patent/JPS5741553B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP14885275A 1975-12-12 1975-12-12 Device for gaseous phase etching Granted JPS5272340A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14885275A JPS5272340A (en) 1975-12-12 1975-12-12 Device for gaseous phase etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14885275A JPS5272340A (en) 1975-12-12 1975-12-12 Device for gaseous phase etching

Publications (2)

Publication Number Publication Date
JPS5272340A true JPS5272340A (en) 1977-06-16
JPS5741553B2 JPS5741553B2 (en) 1982-09-03

Family

ID=15462169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14885275A Granted JPS5272340A (en) 1975-12-12 1975-12-12 Device for gaseous phase etching

Country Status (1)

Country Link
JP (1) JPS5272340A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63306629A (en) * 1987-06-08 1988-12-14 Matsushita Electric Ind Co Ltd Apparatus and method of plasma processing

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147748U (en) * 1984-09-04 1986-03-31 スズキ株式会社 Resin bumper mounting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63306629A (en) * 1987-06-08 1988-12-14 Matsushita Electric Ind Co Ltd Apparatus and method of plasma processing

Also Published As

Publication number Publication date
JPS5741553B2 (en) 1982-09-03

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