JPS5741553B2 - - Google Patents
Info
- Publication number
- JPS5741553B2 JPS5741553B2 JP14885275A JP14885275A JPS5741553B2 JP S5741553 B2 JPS5741553 B2 JP S5741553B2 JP 14885275 A JP14885275 A JP 14885275A JP 14885275 A JP14885275 A JP 14885275A JP S5741553 B2 JPS5741553 B2 JP S5741553B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14885275A JPS5272340A (en) | 1975-12-12 | 1975-12-12 | Device for gaseous phase etching |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14885275A JPS5272340A (en) | 1975-12-12 | 1975-12-12 | Device for gaseous phase etching |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5272340A JPS5272340A (en) | 1977-06-16 |
JPS5741553B2 true JPS5741553B2 (en) | 1982-09-03 |
Family
ID=15462169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14885275A Granted JPS5272340A (en) | 1975-12-12 | 1975-12-12 | Device for gaseous phase etching |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5272340A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0331636Y2 (en) * | 1984-09-04 | 1991-07-04 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63306629A (en) * | 1987-06-08 | 1988-12-14 | Matsushita Electric Ind Co Ltd | Apparatus and method of plasma processing |
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1975
- 1975-12-12 JP JP14885275A patent/JPS5272340A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0331636Y2 (en) * | 1984-09-04 | 1991-07-04 |
Also Published As
Publication number | Publication date |
---|---|
JPS5272340A (en) | 1977-06-16 |