Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
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Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KKfiledCriticalJeol Ltd
Priority to JP50144746ApriorityCriticalpatent/JPS5267915A/en
Publication of JPS5267915ApublicationCriticalpatent/JPS5267915A/en
PURPOSE: To secure an accurate shading compensation by acquiring correction value of electronic beam position on target through computation medium and by performing correction for the signal obtained from pickup tube based on the corrected value.