JPS5265490A - Fluorescence xxray spectrometer - Google Patents

Fluorescence xxray spectrometer

Info

Publication number
JPS5265490A
JPS5265490A JP51139639A JP13963976A JPS5265490A JP S5265490 A JPS5265490 A JP S5265490A JP 51139639 A JP51139639 A JP 51139639A JP 13963976 A JP13963976 A JP 13963976A JP S5265490 A JPS5265490 A JP S5265490A
Authority
JP
Japan
Prior art keywords
xxray
spectrometer
fluorescence
xxray spectrometer
fluorescence xxray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51139639A
Other languages
English (en)
Japanese (ja)
Inventor
Buruuninkusu Edowaarudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of JPS5265490A publication Critical patent/JPS5265490A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/02—Ionisation chambers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP51139639A 1975-11-25 1976-11-22 Fluorescence xxray spectrometer Pending JPS5265490A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7513716A NL7513716A (nl) 1975-11-25 1975-11-25 Roentgenfluorescentie spectrometer.

Publications (1)

Publication Number Publication Date
JPS5265490A true JPS5265490A (en) 1977-05-30

Family

ID=19824912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51139639A Pending JPS5265490A (en) 1975-11-25 1976-11-22 Fluorescence xxray spectrometer

Country Status (7)

Country Link
US (1) US4131794A (ref)
JP (1) JPS5265490A (ref)
AU (1) AU507455B2 (ref)
DE (1) DE2651645A1 (ref)
FR (1) FR2333239A1 (ref)
GB (1) GB1570595A (ref)
NL (1) NL7513716A (ref)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151043A (ja) * 1983-02-04 1984-08-29 エヌ・ベ−・フイリップス・フル−イランペンファブリケン Ｘ−線分析装置
JPS6122240A (ja) * 1984-07-11 1986-01-30 Rigaku Denki Kk 微小部ｘ線分析装置
JPS6122241A (ja) * 1984-07-11 1986-01-30 Rigaku Denki Kk Ｘ線分析装置

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2907948C2 (de) * 1979-03-01 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Röntgendiffraktometer mit hoher zeitlicher Auflösung
DE2925593A1 (de) * 1979-06-25 1981-01-15 Siemens Ag Einrichtung fuer die roentgenfluoreszenzanalyse
DE3125803A1 (de) * 1981-06-30 1983-01-13 Siemens AG, 1000 Berlin und 8000 München Kristall-roentgen-sequenzspektrometer
FI67956C (fi) * 1983-09-22 1985-06-10 Mexpert Oy Pao roentgendiffraktion sig grundande foerfarande och anordning foer maetning av spaenningar
US5007072A (en) * 1988-08-03 1991-04-09 Ion Track Instruments X-ray diffraction inspection system
US5742658A (en) * 1996-05-23 1998-04-21 Advanced Micro Devices, Inc. Apparatus and method for determining the elemental compositions and relative locations of particles on the surface of a semiconductor wafer
US5912940A (en) * 1996-06-10 1999-06-15 O'hara; David Combination wavelength and energy dispersive x-ray spectrometer
US6005915A (en) * 1997-11-07 1999-12-21 Advanced Micro Devices, Inc. Apparatus and method for measuring the roughness of a target material surface based upon the scattering of incident X-ray photons
FR2914424B1 (fr) * 2007-03-30 2012-07-27 Centre Nat Rech Scient Dispositif d'analyse d'un echantillon par rayons x comprenant un systeme analyseur par diffraction filtrant en energie et en angle.
US7593509B2 (en) * 2007-09-27 2009-09-22 Varian Medical Systems, Inc. Analytical x-ray tube for close coupled sample analysis
US8537967B2 (en) * 2009-09-10 2013-09-17 University Of Washington Short working distance spectrometer and associated devices, systems, and methods

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2842670A (en) * 1955-02-23 1958-07-08 Jr La Verne S Birks Flat crystal fluorescent X-ray spectrograph
US3321624A (en) * 1963-04-05 1967-05-23 Hitachi Ltd X-ray spectrometer apparatus having a detector located within the circumference of the rowland circle
US3354308A (en) * 1965-04-30 1967-11-21 Philips Electronic Pharma Apparatus with means to measure the characteristic X-ray emission from and the density of a material
US3663812A (en) * 1969-02-27 1972-05-16 Mc Donnell Douglas Corp X-ray spectrographic means having fixed analyzing and detecting means
US4031396A (en) * 1975-02-28 1977-06-21 General Electric Company X-ray detector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151043A (ja) * 1983-02-04 1984-08-29 エヌ・ベ−・フイリップス・フル−イランペンファブリケン Ｘ−線分析装置
JPH0566548U (ja) * 1983-02-04 1993-09-03 エヌ・ベー・フィリップス・フルーイランペンファブリケン Ｘ−線分析装置
JPS6122240A (ja) * 1984-07-11 1986-01-30 Rigaku Denki Kk 微小部ｘ線分析装置
JPS6122241A (ja) * 1984-07-11 1986-01-30 Rigaku Denki Kk Ｘ線分析装置

Also Published As

Publication number Publication date
FR2333239A1 (fr) 1977-06-24
FR2333239B1 (ref) 1981-12-18
US4131794A (en) 1978-12-26
AU1991276A (en) 1978-06-01
NL7513716A (nl) 1977-05-27
DE2651645A1 (de) 1977-06-02
AU507455B2 (en) 1980-02-14
GB1570595A (en) 1980-07-02

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