JPS5259900A - Manufacture of dielectric film - Google Patents

Manufacture of dielectric film

Info

Publication number
JPS5259900A
JPS5259900A JP50136949A JP13694975A JPS5259900A JP S5259900 A JPS5259900 A JP S5259900A JP 50136949 A JP50136949 A JP 50136949A JP 13694975 A JP13694975 A JP 13694975A JP S5259900 A JPS5259900 A JP S5259900A
Authority
JP
Japan
Prior art keywords
manufacture
dielectric film
silicate
busmuth
spattering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50136949A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5511244B2 (cs
Inventor
Tsuneo Mitsuyu
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50136949A priority Critical patent/JPS5259900A/ja
Publication of JPS5259900A publication Critical patent/JPS5259900A/ja
Publication of JPS5511244B2 publication Critical patent/JPS5511244B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Silicates, Zeolites, And Molecular Sieves (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Insulating Materials (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP50136949A 1975-11-13 1975-11-13 Manufacture of dielectric film Granted JPS5259900A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50136949A JPS5259900A (en) 1975-11-13 1975-11-13 Manufacture of dielectric film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50136949A JPS5259900A (en) 1975-11-13 1975-11-13 Manufacture of dielectric film

Publications (2)

Publication Number Publication Date
JPS5259900A true JPS5259900A (en) 1977-05-17
JPS5511244B2 JPS5511244B2 (cs) 1980-03-24

Family

ID=15187271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50136949A Granted JPS5259900A (en) 1975-11-13 1975-11-13 Manufacture of dielectric film

Country Status (1)

Country Link
JP (1) JPS5259900A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100389071C (zh) * 2006-03-09 2008-05-21 上海交通大学 硅酸铋纳米粉体的制备方法及应用

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100389071C (zh) * 2006-03-09 2008-05-21 上海交通大学 硅酸铋纳米粉体的制备方法及应用

Also Published As

Publication number Publication date
JPS5511244B2 (cs) 1980-03-24

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