JPS5259027A - Peeling solution of ruthenium plating - Google Patents

Peeling solution of ruthenium plating

Info

Publication number
JPS5259027A
JPS5259027A JP13557075A JP13557075A JPS5259027A JP S5259027 A JPS5259027 A JP S5259027A JP 13557075 A JP13557075 A JP 13557075A JP 13557075 A JP13557075 A JP 13557075A JP S5259027 A JPS5259027 A JP S5259027A
Authority
JP
Japan
Prior art keywords
peeling solution
ruthenium plating
ruthenium
plating
peeling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13557075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5424900B2 (cs
Inventor
Kenichi Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP13557075A priority Critical patent/JPS5259027A/ja
Publication of JPS5259027A publication Critical patent/JPS5259027A/ja
Publication of JPS5424900B2 publication Critical patent/JPS5424900B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP13557075A 1975-11-11 1975-11-11 Peeling solution of ruthenium plating Granted JPS5259027A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13557075A JPS5259027A (en) 1975-11-11 1975-11-11 Peeling solution of ruthenium plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13557075A JPS5259027A (en) 1975-11-11 1975-11-11 Peeling solution of ruthenium plating

Publications (2)

Publication Number Publication Date
JPS5259027A true JPS5259027A (en) 1977-05-16
JPS5424900B2 JPS5424900B2 (cs) 1979-08-24

Family

ID=15154892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13557075A Granted JPS5259027A (en) 1975-11-11 1975-11-11 Peeling solution of ruthenium plating

Country Status (1)

Country Link
JP (1) JPS5259027A (cs)

Also Published As

Publication number Publication date
JPS5424900B2 (cs) 1979-08-24

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