JPS5255575A - Vacuum degree measuring element for vacuum valve - Google Patents

Vacuum degree measuring element for vacuum valve

Info

Publication number
JPS5255575A
JPS5255575A JP13041175A JP13041175A JPS5255575A JP S5255575 A JPS5255575 A JP S5255575A JP 13041175 A JP13041175 A JP 13041175A JP 13041175 A JP13041175 A JP 13041175A JP S5255575 A JPS5255575 A JP S5255575A
Authority
JP
Japan
Prior art keywords
vacuum
measuring element
degree measuring
vacuum degree
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13041175A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5758615B2 (en:Method
Inventor
Yoshimasa Kubota
Yukio Kurosawa
Hiroyuki Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13041175A priority Critical patent/JPS5255575A/ja
Publication of JPS5255575A publication Critical patent/JPS5255575A/ja
Publication of JPS5758615B2 publication Critical patent/JPS5758615B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
JP13041175A 1975-10-31 1975-10-31 Vacuum degree measuring element for vacuum valve Granted JPS5255575A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13041175A JPS5255575A (en) 1975-10-31 1975-10-31 Vacuum degree measuring element for vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13041175A JPS5255575A (en) 1975-10-31 1975-10-31 Vacuum degree measuring element for vacuum valve

Publications (2)

Publication Number Publication Date
JPS5255575A true JPS5255575A (en) 1977-05-07
JPS5758615B2 JPS5758615B2 (en:Method) 1982-12-10

Family

ID=15033615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13041175A Granted JPS5255575A (en) 1975-10-31 1975-10-31 Vacuum degree measuring element for vacuum valve

Country Status (1)

Country Link
JP (1) JPS5255575A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60139241U (ja) * 1984-02-27 1985-09-14 日本原子力研究所 荷電粒子分析器の電離真空計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60139241U (ja) * 1984-02-27 1985-09-14 日本原子力研究所 荷電粒子分析器の電離真空計

Also Published As

Publication number Publication date
JPS5758615B2 (en:Method) 1982-12-10

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